JPS5021679A - - Google Patents
Info
- Publication number
- JPS5021679A JPS5021679A JP7150673A JP7150673A JPS5021679A JP S5021679 A JPS5021679 A JP S5021679A JP 7150673 A JP7150673 A JP 7150673A JP 7150673 A JP7150673 A JP 7150673A JP S5021679 A JPS5021679 A JP S5021679A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7150673A JPS5212065B2 (cg-RX-API-DMAC7.html) | 1973-06-25 | 1973-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7150673A JPS5212065B2 (cg-RX-API-DMAC7.html) | 1973-06-25 | 1973-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5021679A true JPS5021679A (cg-RX-API-DMAC7.html) | 1975-03-07 |
| JPS5212065B2 JPS5212065B2 (cg-RX-API-DMAC7.html) | 1977-04-04 |
Family
ID=13462628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7150673A Expired JPS5212065B2 (cg-RX-API-DMAC7.html) | 1973-06-25 | 1973-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5212065B2 (cg-RX-API-DMAC7.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5394767A (en) * | 1977-01-31 | 1978-08-19 | Hitachi Ltd | Manufacture of semiconductor device |
| JPS5477068A (en) * | 1977-12-02 | 1979-06-20 | Hitachi Ltd | Pattern forming method |
| JPS58127328A (ja) * | 1982-01-26 | 1983-07-29 | Seiko Epson Corp | 半導体基板の絶縁保護膜の蝕刻方法 |
| JPS6243133A (ja) * | 1985-08-20 | 1987-02-25 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5648336U (cg-RX-API-DMAC7.html) * | 1979-09-21 | 1981-04-30 |
-
1973
- 1973-06-25 JP JP7150673A patent/JPS5212065B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5394767A (en) * | 1977-01-31 | 1978-08-19 | Hitachi Ltd | Manufacture of semiconductor device |
| JPS5477068A (en) * | 1977-12-02 | 1979-06-20 | Hitachi Ltd | Pattern forming method |
| JPS58127328A (ja) * | 1982-01-26 | 1983-07-29 | Seiko Epson Corp | 半導体基板の絶縁保護膜の蝕刻方法 |
| JPS6243133A (ja) * | 1985-08-20 | 1987-02-25 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5212065B2 (cg-RX-API-DMAC7.html) | 1977-04-04 |