JPS5021677A - - Google Patents

Info

Publication number
JPS5021677A
JPS5021677A JP7192573A JP7192573A JPS5021677A JP S5021677 A JPS5021677 A JP S5021677A JP 7192573 A JP7192573 A JP 7192573A JP 7192573 A JP7192573 A JP 7192573A JP S5021677 A JPS5021677 A JP S5021677A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7192573A
Other versions
JPS5751264B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7192573A priority Critical patent/JPS5751264B2/ja
Publication of JPS5021677A publication Critical patent/JPS5021677A/ja
Publication of JPS5751264B2 publication Critical patent/JPS5751264B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7192573A 1973-06-26 1973-06-26 Expired JPS5751264B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7192573A JPS5751264B2 (ja) 1973-06-26 1973-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7192573A JPS5751264B2 (ja) 1973-06-26 1973-06-26

Publications (2)

Publication Number Publication Date
JPS5021677A true JPS5021677A (ja) 1975-03-07
JPS5751264B2 JPS5751264B2 (ja) 1982-11-01

Family

ID=13474582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7192573A Expired JPS5751264B2 (ja) 1973-06-26 1973-06-26

Country Status (1)

Country Link
JP (1) JPS5751264B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233490A (en) * 1975-09-09 1977-03-14 Nec Corp Manufacturing process of semiconductor device
JPS5893260A (ja) * 1981-11-30 1983-06-02 Toshiba Corp 半導体装置の製造方法
JPH0516051A (ja) * 1991-03-20 1993-01-26 Mitsubishi Electric Corp オートワークチエンジヤー

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233490A (en) * 1975-09-09 1977-03-14 Nec Corp Manufacturing process of semiconductor device
JPS5893260A (ja) * 1981-11-30 1983-06-02 Toshiba Corp 半導体装置の製造方法
JPH0516051A (ja) * 1991-03-20 1993-01-26 Mitsubishi Electric Corp オートワークチエンジヤー

Also Published As

Publication number Publication date
JPS5751264B2 (ja) 1982-11-01

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