JPS5020718B1 - - Google Patents

Info

Publication number
JPS5020718B1
JPS5020718B1 JP41016952A JP1695266A JPS5020718B1 JP S5020718 B1 JPS5020718 B1 JP S5020718B1 JP 41016952 A JP41016952 A JP 41016952A JP 1695266 A JP1695266 A JP 1695266A JP S5020718 B1 JPS5020718 B1 JP S5020718B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP41016952A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5020718B1 publication Critical patent/JPS5020718B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Recrystallisation Techniques (AREA)
JP41016952A 1965-03-19 1966-03-19 Pending JPS5020718B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB11897/65A GB1145013A (en) 1965-03-19 1965-03-19 Improvements in or relating to cold cathode, glow discharge devices

Publications (1)

Publication Number Publication Date
JPS5020718B1 true JPS5020718B1 (fr) 1975-07-17

Family

ID=9994660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP41016952A Pending JPS5020718B1 (fr) 1965-03-19 1966-03-19

Country Status (5)

Country Link
US (1) US3383550A (fr)
JP (1) JPS5020718B1 (fr)
DE (1) DE1539010B1 (fr)
GB (1) GB1145013A (fr)
NL (1) NL6603599A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3038624C2 (de) * 1980-10-13 1984-02-09 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Gasentladungs-Elektronenkanone mit einer Kaltkathode
DE3038644C2 (de) * 1980-10-13 1984-03-15 Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva Steuerungsverfahren für eine Gasentladungs-Elektronenkanone
RU2167466C1 (ru) * 2000-05-30 2001-05-20 Бугров Глеб Эльмирович Плазменный источник ионов и способ его работы

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (de) * 1939-04-12 1953-11-12 Aeg Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen

Also Published As

Publication number Publication date
NL6603599A (fr) 1966-09-20
US3383550A (en) 1968-05-14
DE1539010B1 (de) 1970-10-29
GB1145013A (en) 1969-03-12

Similar Documents

Publication Publication Date Title
JPS45547Y1 (fr)
BE675338A (fr)
BE666636A (fr)
BE666978A (fr)
BE667273A (fr)
BE668441A (fr)
BE668983A (fr)
BE669035A (fr)
BE661907A (fr)
BE669379A (fr)
BE669442A (fr)
BE669488A (fr)
BE670383A (fr)
BE670791A (fr)
BE672573A (fr)
BE672648A (fr)
BE672693A (fr)
BE673219A (fr)
BE673222A (fr)
BE673258A (fr)
BE673319A (fr)
BE673736A (fr)
BE673773A (fr)
BE674276A (fr)
BE674361A (fr)