JPS5020718B1 - - Google Patents
Info
- Publication number
- JPS5020718B1 JPS5020718B1 JP41016952A JP1695266A JPS5020718B1 JP S5020718 B1 JPS5020718 B1 JP S5020718B1 JP 41016952 A JP41016952 A JP 41016952A JP 1695266 A JP1695266 A JP 1695266A JP S5020718 B1 JPS5020718 B1 JP S5020718B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB11897/65A GB1145013A (en) | 1965-03-19 | 1965-03-19 | Improvements in or relating to cold cathode, glow discharge devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5020718B1 true JPS5020718B1 (de) | 1975-07-17 |
Family
ID=9994660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP41016952A Pending JPS5020718B1 (de) | 1965-03-19 | 1966-03-19 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3383550A (de) |
| JP (1) | JPS5020718B1 (de) |
| DE (1) | DE1539010B1 (de) |
| GB (1) | GB1145013A (de) |
| NL (1) | NL6603599A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3038644C2 (de) * | 1980-10-13 | 1984-03-15 | Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva | Steuerungsverfahren für eine Gasentladungs-Elektronenkanone |
| DE3038624C2 (de) * | 1980-10-13 | 1984-02-09 | Vsesojuznyj elektrotechničeskij institut imeni V.I. Lenina, Moskva | Gasentladungs-Elektronenkanone mit einer Kaltkathode |
| RU2167466C1 (ru) * | 2000-05-30 | 2001-05-20 | Бугров Глеб Эльмирович | Плазменный источник ионов и способ его работы |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE896533C (de) * | 1939-04-12 | 1953-11-12 | Aeg | Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen |
-
1965
- 1965-03-19 GB GB11897/65A patent/GB1145013A/en not_active Expired
-
1966
- 1966-03-17 US US535139A patent/US3383550A/en not_active Expired - Lifetime
- 1966-03-18 NL NL6603599A patent/NL6603599A/xx unknown
- 1966-03-18 DE DE19661539010 patent/DE1539010B1/de not_active Withdrawn
- 1966-03-19 JP JP41016952A patent/JPS5020718B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1145013A (en) | 1969-03-12 |
| DE1539010B1 (de) | 1970-10-29 |
| NL6603599A (de) | 1966-09-20 |
| US3383550A (en) | 1968-05-14 |