JPS5016479A - - Google Patents
Info
- Publication number
- JPS5016479A JPS5016479A JP6474373A JP6474373A JPS5016479A JP S5016479 A JPS5016479 A JP S5016479A JP 6474373 A JP6474373 A JP 6474373A JP 6474373 A JP6474373 A JP 6474373A JP S5016479 A JPS5016479 A JP S5016479A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6474373A JPS5016479A (en) | 1973-06-11 | 1973-06-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6474373A JPS5016479A (en) | 1973-06-11 | 1973-06-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5016479A true JPS5016479A (en) | 1975-02-21 |
Family
ID=13266928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6474373A Pending JPS5016479A (en) | 1973-06-11 | 1973-06-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5016479A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57130421A (en) * | 1981-02-04 | 1982-08-12 | Nec Corp | Photo mask |
JPS57171335A (en) * | 1981-04-15 | 1982-10-21 | Nec Corp | Photomask for producing semiconductor ic |
JPS61263227A (en) * | 1985-05-17 | 1986-11-21 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPH01112243A (en) * | 1987-10-26 | 1989-04-28 | Fujitsu Ltd | Production of photomask |
-
1973
- 1973-06-11 JP JP6474373A patent/JPS5016479A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57130421A (en) * | 1981-02-04 | 1982-08-12 | Nec Corp | Photo mask |
JPS57171335A (en) * | 1981-04-15 | 1982-10-21 | Nec Corp | Photomask for producing semiconductor ic |
JPS61263227A (en) * | 1985-05-17 | 1986-11-21 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPH0528492B2 (en) * | 1985-05-17 | 1993-04-26 | Matsushita Electronics Corp | |
JPH01112243A (en) * | 1987-10-26 | 1989-04-28 | Fujitsu Ltd | Production of photomask |