JPS5016479A - - Google Patents

Info

Publication number
JPS5016479A
JPS5016479A JP6474373A JP6474373A JPS5016479A JP S5016479 A JPS5016479 A JP S5016479A JP 6474373 A JP6474373 A JP 6474373A JP 6474373 A JP6474373 A JP 6474373A JP S5016479 A JPS5016479 A JP S5016479A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6474373A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6474373A priority Critical patent/JPS5016479A/ja
Publication of JPS5016479A publication Critical patent/JPS5016479A/ja
Pending legal-status Critical Current

Links

JP6474373A 1973-06-11 1973-06-11 Pending JPS5016479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6474373A JPS5016479A (en) 1973-06-11 1973-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6474373A JPS5016479A (en) 1973-06-11 1973-06-11

Publications (1)

Publication Number Publication Date
JPS5016479A true JPS5016479A (en) 1975-02-21

Family

ID=13266928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6474373A Pending JPS5016479A (en) 1973-06-11 1973-06-11

Country Status (1)

Country Link
JP (1) JPS5016479A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57130421A (en) * 1981-02-04 1982-08-12 Nec Corp Photo mask
JPS57171335A (en) * 1981-04-15 1982-10-21 Nec Corp Photomask for producing semiconductor ic
JPS61263227A (en) * 1985-05-17 1986-11-21 Matsushita Electronics Corp Manufacture of semiconductor device
JPH01112243A (en) * 1987-10-26 1989-04-28 Fujitsu Ltd Production of photomask

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57130421A (en) * 1981-02-04 1982-08-12 Nec Corp Photo mask
JPS57171335A (en) * 1981-04-15 1982-10-21 Nec Corp Photomask for producing semiconductor ic
JPS61263227A (en) * 1985-05-17 1986-11-21 Matsushita Electronics Corp Manufacture of semiconductor device
JPH0528492B2 (en) * 1985-05-17 1993-04-26 Matsushita Electronics Corp
JPH01112243A (en) * 1987-10-26 1989-04-28 Fujitsu Ltd Production of photomask

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