JPS50154069A - - Google Patents
Info
- Publication number
- JPS50154069A JPS50154069A JP6234874A JP6234874A JPS50154069A JP S50154069 A JPS50154069 A JP S50154069A JP 6234874 A JP6234874 A JP 6234874A JP 6234874 A JP6234874 A JP 6234874A JP S50154069 A JPS50154069 A JP S50154069A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
- Led Devices (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49062348A JPS5823742B2 (ja) | 1974-05-31 | 1974-05-31 | キンゴウキンマクノ エツチングホウホウ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49062348A JPS5823742B2 (ja) | 1974-05-31 | 1974-05-31 | キンゴウキンマクノ エツチングホウホウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50154069A true JPS50154069A (ja) | 1975-12-11 |
| JPS5823742B2 JPS5823742B2 (ja) | 1983-05-17 |
Family
ID=13197518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49062348A Expired JPS5823742B2 (ja) | 1974-05-31 | 1974-05-31 | キンゴウキンマクノ エツチングホウホウ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5823742B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61180829U (ja) * | 1985-05-02 | 1986-11-11 | ||
| JP2017183665A (ja) | 2016-03-31 | 2017-10-05 | 芝浦メカトロニクス株式会社 | 基板搬送装置、基板処理装置及び基板処理方法 |
-
1974
- 1974-05-31 JP JP49062348A patent/JPS5823742B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5823742B2 (ja) | 1983-05-17 |