JPS50153871A - - Google Patents
Info
- Publication number
- JPS50153871A JPS50153871A JP6165274A JP6165274A JPS50153871A JP S50153871 A JPS50153871 A JP S50153871A JP 6165274 A JP6165274 A JP 6165274A JP 6165274 A JP6165274 A JP 6165274A JP S50153871 A JPS50153871 A JP S50153871A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6165274A JPS5759543B2 (https=) | 1974-05-30 | 1974-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6165274A JPS5759543B2 (https=) | 1974-05-30 | 1974-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50153871A true JPS50153871A (https=) | 1975-12-11 |
| JPS5759543B2 JPS5759543B2 (https=) | 1982-12-15 |
Family
ID=13177359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6165274A Expired JPS5759543B2 (https=) | 1974-05-30 | 1974-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5759543B2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55146928A (en) * | 1979-05-02 | 1980-11-15 | Ulvac Corp | Manufacturing of photomask substrate |
| JPS5646227A (en) * | 1979-09-21 | 1981-04-27 | Shin Etsu Chem Co Ltd | Mask substrate for electronic device |
| JP2003114501A (ja) * | 2001-10-04 | 2003-04-18 | Konica Corp | ハロゲン化銀写真乾板及びその製造方法 |
-
1974
- 1974-05-30 JP JP6165274A patent/JPS5759543B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55146928A (en) * | 1979-05-02 | 1980-11-15 | Ulvac Corp | Manufacturing of photomask substrate |
| JPS5646227A (en) * | 1979-09-21 | 1981-04-27 | Shin Etsu Chem Co Ltd | Mask substrate for electronic device |
| JP2003114501A (ja) * | 2001-10-04 | 2003-04-18 | Konica Corp | ハロゲン化銀写真乾板及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5759543B2 (https=) | 1982-12-15 |