JPS50152670A - - Google Patents

Info

Publication number
JPS50152670A
JPS50152670A JP49059922A JP5992274A JPS50152670A JP S50152670 A JPS50152670 A JP S50152670A JP 49059922 A JP49059922 A JP 49059922A JP 5992274 A JP5992274 A JP 5992274A JP S50152670 A JPS50152670 A JP S50152670A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49059922A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49059922A priority Critical patent/JPS50152670A/ja
Priority to NL7506294A priority patent/NL7506294A/xx
Priority to DE19752523790 priority patent/DE2523790C2/de
Priority to GB2326075A priority patent/GB1515696A/en
Publication of JPS50152670A publication Critical patent/JPS50152670A/ja
Priority to US05/769,900 priority patent/US4179110A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP49059922A 1974-05-28 1974-05-28 Pending JPS50152670A (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP49059922A JPS50152670A (enrdf_load_stackoverflow) 1974-05-28 1974-05-28
NL7506294A NL7506294A (nl) 1974-05-28 1975-05-28 Werkwijze voor het opstellen van een velachtig materiaal tegenover een standaardvlak met een voorafbepaalde ruimte ertussen.
DE19752523790 DE2523790C2 (de) 1974-05-28 1975-05-28 Vorrichtung zur Anordnung eines Scheibchens parallel und mit bestimmtem Abstand zu einer Maske
GB2326075A GB1515696A (en) 1974-05-28 1975-05-28 Sheet positioning apparatus
US05/769,900 US4179110A (en) 1974-05-28 1977-02-18 Method for opposing a sheet-like material to a standard plane with predetermined space therebetween

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49059922A JPS50152670A (enrdf_load_stackoverflow) 1974-05-28 1974-05-28

Publications (1)

Publication Number Publication Date
JPS50152670A true JPS50152670A (enrdf_load_stackoverflow) 1975-12-08

Family

ID=13127098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49059922A Pending JPS50152670A (enrdf_load_stackoverflow) 1974-05-28 1974-05-28

Country Status (1)

Country Link
JP (1) JPS50152670A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375775A (en) * 1976-12-16 1978-07-05 Canon Inc Alignment unit
JPS5453968A (en) * 1977-10-07 1979-04-27 Canon Inc Alignment unit
JPS5565433A (en) * 1978-11-13 1980-05-16 Nippon Telegr & Teleph Corp <Ntt> Setting device for mask/wafer clearance
JPS5571025A (en) * 1978-11-24 1980-05-28 Hitachi Ltd Providing fine gap
JPS56130738A (en) * 1980-03-19 1981-10-13 Hitachi Ltd Method and device for exposure
JPS6140029A (ja) * 1984-07-31 1986-02-26 Sokueishiya Kk 自動マスク・ウェーハ目合せ焼付方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5375775A (en) * 1976-12-16 1978-07-05 Canon Inc Alignment unit
JPS5453968A (en) * 1977-10-07 1979-04-27 Canon Inc Alignment unit
JPS5565433A (en) * 1978-11-13 1980-05-16 Nippon Telegr & Teleph Corp <Ntt> Setting device for mask/wafer clearance
JPS5571025A (en) * 1978-11-24 1980-05-28 Hitachi Ltd Providing fine gap
JPS56130738A (en) * 1980-03-19 1981-10-13 Hitachi Ltd Method and device for exposure
JPS6140029A (ja) * 1984-07-31 1986-02-26 Sokueishiya Kk 自動マスク・ウェーハ目合せ焼付方法

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