JPS5015109B1 - - Google Patents
Info
- Publication number
- JPS5015109B1 JPS5015109B1 JP45116718A JP11671870A JPS5015109B1 JP S5015109 B1 JPS5015109 B1 JP S5015109B1 JP 45116718 A JP45116718 A JP 45116718A JP 11671870 A JP11671870 A JP 11671870A JP S5015109 B1 JPS5015109 B1 JP S5015109B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45116718A JPS5015109B1 (cs) | 1970-12-24 | 1970-12-24 | |
| US00211201A US3811059A (en) | 1970-12-24 | 1971-12-23 | Electron gun device of field emission type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45116718A JPS5015109B1 (cs) | 1970-12-24 | 1970-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5015109B1 true JPS5015109B1 (cs) | 1975-06-02 |
Family
ID=14694077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45116718A Pending JPS5015109B1 (cs) | 1970-12-24 | 1970-12-24 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3811059A (cs) |
| JP (1) | JPS5015109B1 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3010815C2 (de) * | 1980-03-20 | 1982-08-19 | Siemens AG, 1000 Berlin und 8000 München | Hochstrom-Elektronenquelle |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1779794A (en) * | 1929-06-22 | 1930-10-28 | Westinghouse Electric & Mfg Co | Oscillograph |
| GB615257A (en) * | 1946-05-13 | 1949-01-04 | Gerhard Liebmann | Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses |
| US2619607A (en) * | 1951-03-10 | 1952-11-25 | Glaser Steers Corp | Internal focusing device |
| NL278366A (cs) * | 1961-05-27 | |||
| GB1291221A (en) * | 1968-07-07 | 1972-10-04 | Smith Kenneth C A | Electron probe forming system |
| US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
-
1970
- 1970-12-24 JP JP45116718A patent/JPS5015109B1/ja active Pending
-
1971
- 1971-12-23 US US00211201A patent/US3811059A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3811059A (en) | 1974-05-14 |