JPS50150373A - - Google Patents

Info

Publication number
JPS50150373A
JPS50150373A JP5658774A JP5658774A JPS50150373A JP S50150373 A JPS50150373 A JP S50150373A JP 5658774 A JP5658774 A JP 5658774A JP 5658774 A JP5658774 A JP 5658774A JP S50150373 A JPS50150373 A JP S50150373A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5658774A
Other languages
Japanese (ja)
Other versions
JPS5314470B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5658774A priority Critical patent/JPS5314470B2/ja
Publication of JPS50150373A publication Critical patent/JPS50150373A/ja
Publication of JPS5314470B2 publication Critical patent/JPS5314470B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
JP5658774A 1974-05-22 1974-05-22 Expired JPS5314470B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5658774A JPS5314470B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5658774A JPS5314470B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Publications (2)

Publication Number Publication Date
JPS50150373A true JPS50150373A (enrdf_load_stackoverflow) 1975-12-02
JPS5314470B2 JPS5314470B2 (enrdf_load_stackoverflow) 1978-05-17

Family

ID=13031299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5658774A Expired JPS5314470B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Country Status (1)

Country Link
JP (1) JPS5314470B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546466A (en) * 1977-06-17 1979-01-18 Hitachi Ltd Surface cleaning method
JPS5421265A (en) * 1977-07-19 1979-02-17 Mitsubishi Electric Corp Forming method of semiconductor oxide film
JP2010171128A (ja) * 2009-01-21 2010-08-05 Tokyo Electron Ltd 酸化珪素膜の形成方法、半導体メモリ装置の製造方法およびコンピュータ読み取り可能な記憶媒体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546466A (en) * 1977-06-17 1979-01-18 Hitachi Ltd Surface cleaning method
JPS5421265A (en) * 1977-07-19 1979-02-17 Mitsubishi Electric Corp Forming method of semiconductor oxide film
JP2010171128A (ja) * 2009-01-21 2010-08-05 Tokyo Electron Ltd 酸化珪素膜の形成方法、半導体メモリ装置の製造方法およびコンピュータ読み取り可能な記憶媒体

Also Published As

Publication number Publication date
JPS5314470B2 (enrdf_load_stackoverflow) 1978-05-17

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