|
US5345170A
(en)
|
1992-06-11 |
1994-09-06 |
Cascade Microtech, Inc. |
Wafer probe station having integrated guarding, Kelvin connection and shielding systems
|
|
US6380751B2
(en)
|
1992-06-11 |
2002-04-30 |
Cascade Microtech, Inc. |
Wafer probe station having environment control enclosure
|
|
US5561377A
(en)
|
1995-04-14 |
1996-10-01 |
Cascade Microtech, Inc. |
System for evaluating probing networks
|
|
US6232789B1
(en)
|
1997-05-28 |
2001-05-15 |
Cascade Microtech, Inc. |
Probe holder for low current measurements
|
|
US5914613A
(en)
|
1996-08-08 |
1999-06-22 |
Cascade Microtech, Inc. |
Membrane probing system with local contact scrub
|
|
US6002263A
(en)
|
1997-06-06 |
1999-12-14 |
Cascade Microtech, Inc. |
Probe station having inner and outer shielding
|
|
US6578264B1
(en)
|
1999-06-04 |
2003-06-17 |
Cascade Microtech, Inc. |
Method for constructing a membrane probe using a depression
|
|
US6445202B1
(en)
|
1999-06-30 |
2002-09-03 |
Cascade Microtech, Inc. |
Probe station thermal chuck with shielding for capacitive current
|
|
US6838890B2
(en)
|
2000-02-25 |
2005-01-04 |
Cascade Microtech, Inc. |
Membrane probing system
|
|
US6914423B2
(en)
|
2000-09-05 |
2005-07-05 |
Cascade Microtech, Inc. |
Probe station
|
|
US6965226B2
(en)
|
2000-09-05 |
2005-11-15 |
Cascade Microtech, Inc. |
Chuck for holding a device under test
|
|
DE10143173A1
(de)
|
2000-12-04 |
2002-06-06 |
Cascade Microtech Inc |
Wafersonde
|
|
US7355420B2
(en)
|
2001-08-21 |
2008-04-08 |
Cascade Microtech, Inc. |
Membrane probing system
|
|
EP1432546A4
(en)
|
2001-08-31 |
2006-06-07 |
Cascade Microtech Inc |
OPTICAL TESTING APPARATUS
|
|
US6777964B2
(en)
|
2002-01-25 |
2004-08-17 |
Cascade Microtech, Inc. |
Probe station
|
|
EP1509776A4
(en)
|
2002-05-23 |
2010-08-18 |
Cascade Microtech Inc |
PROBE TO TEST ANY TESTING EQUIPMENT
|
|
US6847219B1
(en)
|
2002-11-08 |
2005-01-25 |
Cascade Microtech, Inc. |
Probe station with low noise characteristics
|
|
US6724205B1
(en)
|
2002-11-13 |
2004-04-20 |
Cascade Microtech, Inc. |
Probe for combined signals
|
|
US7250779B2
(en)
|
2002-11-25 |
2007-07-31 |
Cascade Microtech, Inc. |
Probe station with low inductance path
|
|
US6861856B2
(en)
|
2002-12-13 |
2005-03-01 |
Cascade Microtech, Inc. |
Guarded tub enclosure
|
|
US7221172B2
(en)
|
2003-05-06 |
2007-05-22 |
Cascade Microtech, Inc. |
Switched suspended conductor and connection
|
|
US7057404B2
(en)
|
2003-05-23 |
2006-06-06 |
Sharp Laboratories Of America, Inc. |
Shielded probe for testing a device under test
|
|
US7492172B2
(en)
|
2003-05-23 |
2009-02-17 |
Cascade Microtech, Inc. |
Chuck for holding a device under test
|
|
US7250626B2
(en)
|
2003-10-22 |
2007-07-31 |
Cascade Microtech, Inc. |
Probe testing structure
|
|
US7187188B2
(en)
|
2003-12-24 |
2007-03-06 |
Cascade Microtech, Inc. |
Chuck with integrated wafer support
|
|
DE202005021434U1
(de)
|
2004-06-07 |
2008-03-20 |
Cascade Microtech, Inc., Beaverton |
Thermooptische Einspannvorrichtung
|
|
US7330041B2
(en)
|
2004-06-14 |
2008-02-12 |
Cascade Microtech, Inc. |
Localizing a temperature of a device for testing
|
|
KR101157449B1
(ko)
|
2004-07-07 |
2012-06-22 |
캐스케이드 마이크로테크 인코포레이티드 |
멤브레인 서스펜디드 프로브를 구비한 프로브 헤드
|
|
KR20070058522A
(ko)
|
2004-09-13 |
2007-06-08 |
캐스케이드 마이크로테크 인코포레이티드 |
양측 프루빙 구조
|
|
US7535247B2
(en)
|
2005-01-31 |
2009-05-19 |
Cascade Microtech, Inc. |
Interface for testing semiconductors
|
|
US7449899B2
(en)
|
2005-06-08 |
2008-11-11 |
Cascade Microtech, Inc. |
Probe for high frequency signals
|
|
EP1932003A2
(en)
|
2005-06-13 |
2008-06-18 |
Cascade Microtech, Inc. |
Wideband active-passive differential signal probe
|
|
US7609077B2
(en)
|
2006-06-09 |
2009-10-27 |
Cascade Microtech, Inc. |
Differential signal probe with integral balun
|
|
US7403028B2
(en)
|
2006-06-12 |
2008-07-22 |
Cascade Microtech, Inc. |
Test structure and probe for differential signals
|
|
US7443186B2
(en)
|
2006-06-12 |
2008-10-28 |
Cascade Microtech, Inc. |
On-wafer test structures for differential signals
|