JPS50142163A - - Google Patents
Info
- Publication number
- JPS50142163A JPS50142163A JP5040174A JP5040174A JPS50142163A JP S50142163 A JPS50142163 A JP S50142163A JP 5040174 A JP5040174 A JP 5040174A JP 5040174 A JP5040174 A JP 5040174A JP S50142163 A JPS50142163 A JP S50142163A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5040174A JPS50142163A (de) | 1974-05-07 | 1974-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5040174A JPS50142163A (de) | 1974-05-07 | 1974-05-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50142163A true JPS50142163A (de) | 1975-11-15 |
Family
ID=12857833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5040174A Pending JPS50142163A (de) | 1974-05-07 | 1974-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50142163A (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5586135A (en) * | 1978-12-23 | 1980-06-28 | Fujitsu Ltd | Preparation of semiconductor device |
| JPH02116520A (ja) * | 1988-10-10 | 1990-05-01 | Internatl Business Mach Corp <Ibm> | 板状体を切断する方法 |
| JPH0722357A (ja) * | 1990-05-25 | 1995-01-24 | Internatl Business Mach Corp <Ibm> | 半導体ウェーハ一括切断及び切断切子面被覆方法 |
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1974
- 1974-05-07 JP JP5040174A patent/JPS50142163A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5586135A (en) * | 1978-12-23 | 1980-06-28 | Fujitsu Ltd | Preparation of semiconductor device |
| JPS5735583B2 (de) * | 1978-12-23 | 1982-07-29 | ||
| JPH02116520A (ja) * | 1988-10-10 | 1990-05-01 | Internatl Business Mach Corp <Ibm> | 板状体を切断する方法 |
| JPH0722357A (ja) * | 1990-05-25 | 1995-01-24 | Internatl Business Mach Corp <Ibm> | 半導体ウェーハ一括切断及び切断切子面被覆方法 |