JPS50130375A - - Google Patents

Info

Publication number
JPS50130375A
JPS50130375A JP49035670A JP3567074A JPS50130375A JP S50130375 A JPS50130375 A JP S50130375A JP 49035670 A JP49035670 A JP 49035670A JP 3567074 A JP3567074 A JP 3567074A JP S50130375 A JPS50130375 A JP S50130375A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49035670A
Other languages
Japanese (ja)
Other versions
JPS5441306B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3567074A priority Critical patent/JPS5441306B2/ja
Publication of JPS50130375A publication Critical patent/JPS50130375A/ja
Publication of JPS5441306B2 publication Critical patent/JPS5441306B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP3567074A 1974-04-01 1974-04-01 Expired JPS5441306B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3567074A JPS5441306B2 (https=) 1974-04-01 1974-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3567074A JPS5441306B2 (https=) 1974-04-01 1974-04-01

Publications (2)

Publication Number Publication Date
JPS50130375A true JPS50130375A (https=) 1975-10-15
JPS5441306B2 JPS5441306B2 (https=) 1979-12-07

Family

ID=12448297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3567074A Expired JPS5441306B2 (https=) 1974-04-01 1974-04-01

Country Status (1)

Country Link
JP (1) JPS5441306B2 (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107141A (en) * 1980-01-30 1981-08-25 Matsushita Electric Ind Co Ltd Pressure sensor
JPS59141273A (ja) * 1983-02-01 1984-08-13 Anelva Corp 薄膜装置
JPS59159573A (ja) * 1983-03-02 1984-09-10 Yamatake Honeywell Co Ltd 半導体圧力変換器
JPS6165126A (ja) * 1984-09-06 1986-04-03 Copal Denshi Kk 圧力センサ
JPS61217733A (ja) * 1985-03-25 1986-09-27 Nippon Soken Inc 圧力検出器
JPH02257029A (ja) * 1989-09-07 1990-10-17 Copal Electron Co Ltd 圧力センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3713068A (en) * 1971-06-07 1973-01-23 Itt Bonded assemblies and methods of making the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3713068A (en) * 1971-06-07 1973-01-23 Itt Bonded assemblies and methods of making the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56107141A (en) * 1980-01-30 1981-08-25 Matsushita Electric Ind Co Ltd Pressure sensor
JPS59141273A (ja) * 1983-02-01 1984-08-13 Anelva Corp 薄膜装置
JPS59159573A (ja) * 1983-03-02 1984-09-10 Yamatake Honeywell Co Ltd 半導体圧力変換器
JPS6165126A (ja) * 1984-09-06 1986-04-03 Copal Denshi Kk 圧力センサ
JPS61217733A (ja) * 1985-03-25 1986-09-27 Nippon Soken Inc 圧力検出器
JPH02257029A (ja) * 1989-09-07 1990-10-17 Copal Electron Co Ltd 圧力センサ

Also Published As

Publication number Publication date
JPS5441306B2 (https=) 1979-12-07

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