JPS50129187A - - Google Patents
Info
- Publication number
- JPS50129187A JPS50129187A JP50018678A JP1867875A JPS50129187A JP S50129187 A JPS50129187 A JP S50129187A JP 50018678 A JP50018678 A JP 50018678A JP 1867875 A JP1867875 A JP 1867875A JP S50129187 A JPS50129187 A JP S50129187A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W99/00—Subject matter not provided for in other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/64—Wet etching of semiconductor materials
- H10P50/642—Chemical etching
- H10P50/644—Anisotropic liquid etching
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49103—Strain gauge making
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US455050A US3909924A (en) | 1974-03-27 | 1974-03-27 | Method of fabrication of silicon pressure transducer sensor units |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50129187A true JPS50129187A (https=) | 1975-10-13 |
| JPS5759675B2 JPS5759675B2 (https=) | 1982-12-15 |
Family
ID=23807177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50018678A Expired JPS5759675B2 (https=) | 1974-03-27 | 1975-02-14 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3909924A (https=) |
| JP (1) | JPS5759675B2 (https=) |
| CA (1) | CA1016668A (https=) |
| DE (1) | DE2503781C2 (https=) |
| FR (1) | FR2266314B1 (https=) |
| GB (1) | GB1476582A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57500491A (https=) * | 1980-04-14 | 1982-03-18 |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4121334A (en) * | 1974-12-17 | 1978-10-24 | P. R. Mallory & Co. Inc. | Application of field-assisted bonding to the mass production of silicon type pressure transducers |
| US4023562A (en) * | 1975-09-02 | 1977-05-17 | Case Western Reserve University | Miniature pressure transducer for medical use and assembly method |
| US4144516A (en) * | 1976-03-29 | 1979-03-13 | Aine Harry E | Solid state transducer and method of making same |
| US4376929A (en) * | 1976-12-27 | 1983-03-15 | Myhre Kjell E | Optimized stress and strain distribution diaphragms |
| US4133100A (en) * | 1976-12-27 | 1979-01-09 | Myhre Kjell E | Method of making diaphragm of optimized stress and strain distribution |
| US4790192A (en) * | 1987-09-24 | 1988-12-13 | Rosemount Inc. | Silicon side by side coplanar pressure sensors |
| US4987780A (en) * | 1987-11-16 | 1991-01-29 | Litton Systems, Inc. | Integrated accelerometer assembly |
| US5006487A (en) * | 1989-07-27 | 1991-04-09 | Honeywell Inc. | Method of making an electrostatic silicon accelerometer |
| JPH0352186U (https=) * | 1989-09-28 | 1991-05-21 | ||
| US6903084B2 (en) | 1991-08-28 | 2005-06-07 | Sterix Limited | Steroid sulphatase inhibitors |
| US5616514A (en) * | 1993-06-03 | 1997-04-01 | Robert Bosch Gmbh | Method of fabricating a micromechanical sensor |
| US6021675A (en) * | 1995-06-07 | 2000-02-08 | Ssi Technologies, Inc. | Resonating structure and method for forming the resonating structure |
| CA2176052A1 (en) * | 1995-06-07 | 1996-12-08 | James D. Seefeldt | Transducer having a resonating silicon beam and method for forming same |
| US5736430A (en) * | 1995-06-07 | 1998-04-07 | Ssi Technologies, Inc. | Transducer having a silicon diaphragm and method for forming same |
| US5636729A (en) * | 1995-06-12 | 1997-06-10 | Wiciel; Richard | Piezo switch |
| US5831170A (en) * | 1996-04-04 | 1998-11-03 | Ssi Technologies, Inc. | Pressure sensor package and method of making the same |
| US5874679A (en) * | 1996-04-04 | 1999-02-23 | Ssi Technologies, Inc. | Pressure sensor package and method of making the same |
| EP0800070B1 (en) * | 1996-04-04 | 2001-08-22 | Ssi Technologies, Inc. | Pressure sensor package and method of making the same |
| US5999082A (en) * | 1998-03-25 | 1999-12-07 | Kulite Semiconductor Products, Inc. | Compensated oil-filled pressure transducers |
| US7273763B1 (en) * | 1998-12-15 | 2007-09-25 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Method of producing a micro-electromechanical element |
| US7335650B2 (en) * | 2000-01-14 | 2008-02-26 | Sterix Limited | Composition |
| JP2006237118A (ja) * | 2005-02-23 | 2006-09-07 | Matsushita Electric Ind Co Ltd | 圧電素子の製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3160539A (en) * | 1958-09-08 | 1964-12-08 | Trw Semiconductors Inc | Surface treatment of silicon |
| US3757414A (en) * | 1971-03-26 | 1973-09-11 | Honeywell Inc | Method for batch fabricating semiconductor devices |
-
1974
- 1974-03-27 US US455050A patent/US3909924A/en not_active Expired - Lifetime
- 1974-12-02 CA CA215,034A patent/CA1016668A/en not_active Expired
-
1975
- 1975-01-30 DE DE2503781A patent/DE2503781C2/de not_active Expired
- 1975-02-14 JP JP50018678A patent/JPS5759675B2/ja not_active Expired
- 1975-03-10 FR FR7507341A patent/FR2266314B1/fr not_active Expired
- 1975-03-11 GB GB1013175A patent/GB1476582A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57500491A (https=) * | 1980-04-14 | 1982-03-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2266314A1 (https=) | 1975-10-24 |
| CA1016668A (en) | 1977-08-30 |
| JPS5759675B2 (https=) | 1982-12-15 |
| DE2503781A1 (de) | 1976-02-05 |
| DE2503781C2 (de) | 1984-06-28 |
| FR2266314B1 (https=) | 1980-11-07 |
| US3909924A (en) | 1975-10-07 |
| GB1476582A (en) | 1977-06-16 |