JPS50121135A - - Google Patents
Info
- Publication number
- JPS50121135A JPS50121135A JP2710674A JP2710674A JPS50121135A JP S50121135 A JPS50121135 A JP S50121135A JP 2710674 A JP2710674 A JP 2710674A JP 2710674 A JP2710674 A JP 2710674A JP S50121135 A JPS50121135 A JP S50121135A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2710674A JPS50121135A (no) | 1974-03-11 | 1974-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2710674A JPS50121135A (no) | 1974-03-11 | 1974-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50121135A true JPS50121135A (no) | 1975-09-22 |
Family
ID=12211821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2710674A Pending JPS50121135A (no) | 1974-03-11 | 1974-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50121135A (no) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5384885A (en) * | 1976-12-31 | 1978-07-26 | Youichi Murayama | Surface treating apparatus |
| JPS5675572A (en) * | 1979-11-22 | 1981-06-22 | Fujitsu Ltd | Sputtering device |
| JPS59145564U (ja) * | 1983-03-18 | 1984-09-28 | 株式会社日立製作所 | スパツタリング装置 |
| JPS59172165A (ja) * | 1983-03-18 | 1984-09-28 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法およびその装置 |
| JPS59202637A (ja) * | 1983-05-04 | 1984-11-16 | Matsushita Electric Ind Co Ltd | イオンビ−ム装置 |
| JPS61276971A (ja) * | 1985-05-31 | 1986-12-06 | Toyoda Gosei Co Ltd | スパツタリング装置 |
| JPS6272112A (ja) * | 1985-09-26 | 1987-04-02 | Mitsubishi Electric Corp | 薄膜形成装置 |
| JPH0387357A (ja) * | 1989-06-13 | 1991-04-12 | Nippon Mining Co Ltd | 薄膜形成装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS479567U (no) * | 1971-02-26 | 1972-10-04 |
-
1974
- 1974-03-11 JP JP2710674A patent/JPS50121135A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS479567U (no) * | 1971-02-26 | 1972-10-04 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5384885A (en) * | 1976-12-31 | 1978-07-26 | Youichi Murayama | Surface treating apparatus |
| JPS5675572A (en) * | 1979-11-22 | 1981-06-22 | Fujitsu Ltd | Sputtering device |
| JPS59145564U (ja) * | 1983-03-18 | 1984-09-28 | 株式会社日立製作所 | スパツタリング装置 |
| JPS59172165A (ja) * | 1983-03-18 | 1984-09-28 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法およびその装置 |
| JPS59202637A (ja) * | 1983-05-04 | 1984-11-16 | Matsushita Electric Ind Co Ltd | イオンビ−ム装置 |
| JPS61276971A (ja) * | 1985-05-31 | 1986-12-06 | Toyoda Gosei Co Ltd | スパツタリング装置 |
| JPS6272112A (ja) * | 1985-09-26 | 1987-04-02 | Mitsubishi Electric Corp | 薄膜形成装置 |
| JPH0387357A (ja) * | 1989-06-13 | 1991-04-12 | Nippon Mining Co Ltd | 薄膜形成装置 |