JPS50121135A - - Google Patents

Info

Publication number
JPS50121135A
JPS50121135A JP2710674A JP2710674A JPS50121135A JP S50121135 A JPS50121135 A JP S50121135A JP 2710674 A JP2710674 A JP 2710674A JP 2710674 A JP2710674 A JP 2710674A JP S50121135 A JPS50121135 A JP S50121135A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2710674A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2710674A priority Critical patent/JPS50121135A/ja
Publication of JPS50121135A publication Critical patent/JPS50121135A/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP2710674A 1974-03-11 1974-03-11 Pending JPS50121135A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2710674A JPS50121135A (enrdf_load_stackoverflow) 1974-03-11 1974-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2710674A JPS50121135A (enrdf_load_stackoverflow) 1974-03-11 1974-03-11

Publications (1)

Publication Number Publication Date
JPS50121135A true JPS50121135A (enrdf_load_stackoverflow) 1975-09-22

Family

ID=12211821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2710674A Pending JPS50121135A (enrdf_load_stackoverflow) 1974-03-11 1974-03-11

Country Status (1)

Country Link
JP (1) JPS50121135A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5384885A (en) * 1976-12-31 1978-07-26 Youichi Murayama Surface treating apparatus
JPS5675572A (en) * 1979-11-22 1981-06-22 Fujitsu Ltd Sputtering device
JPS59145564U (ja) * 1983-03-18 1984-09-28 株式会社日立製作所 スパツタリング装置
JPS59172165A (ja) * 1983-03-18 1984-09-28 Hitachi Maxell Ltd 磁気記録媒体の製造方法およびその装置
JPS59202637A (ja) * 1983-05-04 1984-11-16 Matsushita Electric Ind Co Ltd イオンビ−ム装置
JPS61276971A (ja) * 1985-05-31 1986-12-06 Toyoda Gosei Co Ltd スパツタリング装置
JPS6272112A (ja) * 1985-09-26 1987-04-02 Mitsubishi Electric Corp 薄膜形成装置
JPH0387357A (ja) * 1989-06-13 1991-04-12 Nippon Mining Co Ltd 薄膜形成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS479567U (enrdf_load_stackoverflow) * 1971-02-26 1972-10-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS479567U (enrdf_load_stackoverflow) * 1971-02-26 1972-10-04

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5384885A (en) * 1976-12-31 1978-07-26 Youichi Murayama Surface treating apparatus
JPS5675572A (en) * 1979-11-22 1981-06-22 Fujitsu Ltd Sputtering device
JPS59145564U (ja) * 1983-03-18 1984-09-28 株式会社日立製作所 スパツタリング装置
JPS59172165A (ja) * 1983-03-18 1984-09-28 Hitachi Maxell Ltd 磁気記録媒体の製造方法およびその装置
JPS59202637A (ja) * 1983-05-04 1984-11-16 Matsushita Electric Ind Co Ltd イオンビ−ム装置
JPS61276971A (ja) * 1985-05-31 1986-12-06 Toyoda Gosei Co Ltd スパツタリング装置
JPS6272112A (ja) * 1985-09-26 1987-04-02 Mitsubishi Electric Corp 薄膜形成装置
JPH0387357A (ja) * 1989-06-13 1991-04-12 Nippon Mining Co Ltd 薄膜形成装置

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