JPS50121043U - - Google Patents

Info

Publication number
JPS50121043U
JPS50121043U JP3116574U JP3116574U JPS50121043U JP S50121043 U JPS50121043 U JP S50121043U JP 3116574 U JP3116574 U JP 3116574U JP 3116574 U JP3116574 U JP 3116574U JP S50121043 U JPS50121043 U JP S50121043U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3116574U
Other languages
Japanese (ja)
Other versions
JPS5524133Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974031165U priority Critical patent/JPS5524133Y2/ja
Publication of JPS50121043U publication Critical patent/JPS50121043U/ja
Application granted granted Critical
Publication of JPS5524133Y2 publication Critical patent/JPS5524133Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1974031165U 1974-03-20 1974-03-20 Expired JPS5524133Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974031165U JPS5524133Y2 (en) 1974-03-20 1974-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974031165U JPS5524133Y2 (en) 1974-03-20 1974-03-20

Publications (2)

Publication Number Publication Date
JPS50121043U true JPS50121043U (en) 1975-10-03
JPS5524133Y2 JPS5524133Y2 (en) 1980-06-09

Family

ID=28139934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974031165U Expired JPS5524133Y2 (en) 1974-03-20 1974-03-20

Country Status (1)

Country Link
JP (1) JPS5524133Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391663A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4713414U (en) * 1971-03-19 1972-10-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4713414U (en) * 1971-03-19 1972-10-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391663A (en) * 1977-01-24 1978-08-11 Hitachi Ltd Plasma cvd device

Also Published As

Publication number Publication date
JPS5524133Y2 (en) 1980-06-09

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