JPS5524133Y2 - - Google Patents
Info
- Publication number
- JPS5524133Y2 JPS5524133Y2 JP1974031165U JP3116574U JPS5524133Y2 JP S5524133 Y2 JPS5524133 Y2 JP S5524133Y2 JP 1974031165 U JP1974031165 U JP 1974031165U JP 3116574 U JP3116574 U JP 3116574U JP S5524133 Y2 JPS5524133 Y2 JP S5524133Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1974031165U JPS5524133Y2 (en) | 1974-03-20 | 1974-03-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1974031165U JPS5524133Y2 (en) | 1974-03-20 | 1974-03-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50121043U JPS50121043U (en) | 1975-10-03 |
JPS5524133Y2 true JPS5524133Y2 (en) | 1980-06-09 |
Family
ID=28139934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1974031165U Expired JPS5524133Y2 (en) | 1974-03-20 | 1974-03-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5524133Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5931977B2 (en) * | 1977-01-24 | 1984-08-06 | 株式会社日立製作所 | Plasma CVD equipment |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5017945Y2 (en) * | 1971-03-19 | 1975-06-02 |
-
1974
- 1974-03-20 JP JP1974031165U patent/JPS5524133Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS50121043U (en) | 1975-10-03 |