JPS50119998A - - Google Patents
Info
- Publication number
- JPS50119998A JPS50119998A JP49028733A JP2873374A JPS50119998A JP S50119998 A JPS50119998 A JP S50119998A JP 49028733 A JP49028733 A JP 49028733A JP 2873374 A JP2873374 A JP 2873374A JP S50119998 A JPS50119998 A JP S50119998A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2873374A JPS5521474B2 (pt) | 1974-03-12 | 1974-03-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2873374A JPS5521474B2 (pt) | 1974-03-12 | 1974-03-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50119998A true JPS50119998A (pt) | 1975-09-19 |
JPS5521474B2 JPS5521474B2 (pt) | 1980-06-10 |
Family
ID=12256622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2873374A Expired JPS5521474B2 (pt) | 1974-03-12 | 1974-03-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5521474B2 (pt) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51112488A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Method of producing a zinc oxide film |
FR2399133A1 (fr) * | 1977-07-28 | 1979-02-23 | Murata Manufacturing Co | Pellicule cristalline piezo-electrique d'oxyde de zinc |
JPS5516555A (en) * | 1978-07-21 | 1980-02-05 | Toko Inc | Manufacture of thin film of zinc oxide |
JPH05194016A (ja) * | 1992-01-22 | 1993-08-03 | Murata Mfg Co Ltd | 圧電セラミックス |
JP2003533006A (ja) * | 1998-08-03 | 2003-11-05 | ザ・キュレーターズ・オブ・ザ・ユニバーシティ・オブ・ミズーリ | P型ドーパントを含有する酸化亜鉛膜およびその製造方法 |
-
1974
- 1974-03-12 JP JP2873374A patent/JPS5521474B2/ja not_active Expired
Non-Patent Citations (3)
Title |
---|
JOURNAL OF APPLIED PHYSICS=1968 * |
SOLID STATE PHYSICS=1959 * |
THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY=1970 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51112488A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Method of producing a zinc oxide film |
FR2399133A1 (fr) * | 1977-07-28 | 1979-02-23 | Murata Manufacturing Co | Pellicule cristalline piezo-electrique d'oxyde de zinc |
JPS5516555A (en) * | 1978-07-21 | 1980-02-05 | Toko Inc | Manufacture of thin film of zinc oxide |
JPH05194016A (ja) * | 1992-01-22 | 1993-08-03 | Murata Mfg Co Ltd | 圧電セラミックス |
JP2003533006A (ja) * | 1998-08-03 | 2003-11-05 | ザ・キュレーターズ・オブ・ザ・ユニバーシティ・オブ・ミズーリ | P型ドーパントを含有する酸化亜鉛膜およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5521474B2 (pt) | 1980-06-10 |