JPS50118978A - - Google Patents

Info

Publication number
JPS50118978A
JPS50118978A JP2543074A JP2543074A JPS50118978A JP S50118978 A JPS50118978 A JP S50118978A JP 2543074 A JP2543074 A JP 2543074A JP 2543074 A JP2543074 A JP 2543074A JP S50118978 A JPS50118978 A JP S50118978A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2543074A
Other languages
Japanese (ja)
Other versions
JPS5644149B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2543074A priority Critical patent/JPS5644149B2/ja
Publication of JPS50118978A publication Critical patent/JPS50118978A/ja
Publication of JPS5644149B2 publication Critical patent/JPS5644149B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2543074A 1974-03-04 1974-03-04 Expired JPS5644149B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2543074A JPS5644149B2 (cg-RX-API-DMAC7.html) 1974-03-04 1974-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2543074A JPS5644149B2 (cg-RX-API-DMAC7.html) 1974-03-04 1974-03-04

Publications (2)

Publication Number Publication Date
JPS50118978A true JPS50118978A (cg-RX-API-DMAC7.html) 1975-09-18
JPS5644149B2 JPS5644149B2 (cg-RX-API-DMAC7.html) 1981-10-17

Family

ID=12165742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2543074A Expired JPS5644149B2 (cg-RX-API-DMAC7.html) 1974-03-04 1974-03-04

Country Status (1)

Country Link
JP (1) JPS5644149B2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110126A (en) * 1979-02-16 1980-08-25 Seiko Epson Corp Preparation of antireflection film
JPS5913067A (ja) * 1982-07-13 1984-01-23 Matsushita Electric Ind Co Ltd 薄膜生成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110126A (en) * 1979-02-16 1980-08-25 Seiko Epson Corp Preparation of antireflection film
JPS5913067A (ja) * 1982-07-13 1984-01-23 Matsushita Electric Ind Co Ltd 薄膜生成方法

Also Published As

Publication number Publication date
JPS5644149B2 (cg-RX-API-DMAC7.html) 1981-10-17

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