JPS50118978A - - Google Patents

Info

Publication number
JPS50118978A
JPS50118978A JP2543074A JP2543074A JPS50118978A JP S50118978 A JPS50118978 A JP S50118978A JP 2543074 A JP2543074 A JP 2543074A JP 2543074 A JP2543074 A JP 2543074A JP S50118978 A JPS50118978 A JP S50118978A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2543074A
Other versions
JPS5644149B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2543074A priority Critical patent/JPS5644149B2/ja
Publication of JPS50118978A publication Critical patent/JPS50118978A/ja
Publication of JPS5644149B2 publication Critical patent/JPS5644149B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2543074A 1974-03-04 1974-03-04 Expired JPS5644149B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2543074A JPS5644149B2 (ja) 1974-03-04 1974-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2543074A JPS5644149B2 (ja) 1974-03-04 1974-03-04

Publications (2)

Publication Number Publication Date
JPS50118978A true JPS50118978A (ja) 1975-09-18
JPS5644149B2 JPS5644149B2 (ja) 1981-10-17

Family

ID=12165742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2543074A Expired JPS5644149B2 (ja) 1974-03-04 1974-03-04

Country Status (1)

Country Link
JP (1) JPS5644149B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110126A (en) * 1979-02-16 1980-08-25 Seiko Epson Corp Preparation of antireflection film
JPS5913067A (ja) * 1982-07-13 1984-01-23 Matsushita Electric Ind Co Ltd 薄膜生成方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55110126A (en) * 1979-02-16 1980-08-25 Seiko Epson Corp Preparation of antireflection film
JPS6149387B2 (ja) * 1979-02-16 1986-10-29 Suwa Seikosha Kk
JPS5913067A (ja) * 1982-07-13 1984-01-23 Matsushita Electric Ind Co Ltd 薄膜生成方法
JPH0138871B2 (ja) * 1982-07-13 1989-08-16 Matsushita Electric Ind Co Ltd

Also Published As

Publication number Publication date
JPS5644149B2 (ja) 1981-10-17

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