JPS5010949B2 - - Google Patents

Info

Publication number
JPS5010949B2
JPS5010949B2 JP6831672A JP6831672A JPS5010949B2 JP S5010949 B2 JPS5010949 B2 JP S5010949B2 JP 6831672 A JP6831672 A JP 6831672A JP 6831672 A JP6831672 A JP 6831672A JP S5010949 B2 JPS5010949 B2 JP S5010949B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6831672A
Other languages
Japanese (ja)
Other versions
JPS4926477A (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6831672A priority Critical patent/JPS5010949B2/ja
Publication of JPS4926477A publication Critical patent/JPS4926477A/ja
Publication of JPS5010949B2 publication Critical patent/JPS5010949B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Confectionery (AREA)
  • Manufacturing And Processing Devices For Dough (AREA)
JP6831672A 1972-07-07 1972-07-07 Expired JPS5010949B2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6831672A JPS5010949B2 (enEXAMPLES) 1972-07-07 1972-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6831672A JPS5010949B2 (enEXAMPLES) 1972-07-07 1972-07-07

Publications (2)

Publication Number Publication Date
JPS4926477A JPS4926477A (enEXAMPLES) 1974-03-08
JPS5010949B2 true JPS5010949B2 (enEXAMPLES) 1975-04-25

Family

ID=13370277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6831672A Expired JPS5010949B2 (enEXAMPLES) 1972-07-07 1972-07-07

Country Status (1)

Country Link
JP (1) JPS5010949B2 (enEXAMPLES)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5134599U (enEXAMPLES) * 1974-09-05 1976-03-15
JPS5544355Y2 (enEXAMPLES) * 1975-10-22 1980-10-17
JPS6165427A (ja) * 1984-09-07 1986-04-04 Toshiba Corp 移動ステ−ジ装置
JPS61137113A (ja) * 1984-12-07 1986-06-24 Nec Corp アライナ−
JPS60173614A (ja) * 1984-12-21 1985-09-07 Hitachi Ltd 位置決め装置
JPS62112846U (enEXAMPLES) * 1985-12-13 1987-07-18
KR940002734B1 (ko) * 1990-12-26 1994-03-31 재단법인 한국전자통신연구소 고체형 엑취에이터(Actuator)를 이용한 웨이퍼의 정밀구동장치

Also Published As

Publication number Publication date
JPS4926477A (enEXAMPLES) 1974-03-08

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