JPS4991177A - - Google Patents
Info
- Publication number
- JPS4991177A JPS4991177A JP129973A JP129973A JPS4991177A JP S4991177 A JPS4991177 A JP S4991177A JP 129973 A JP129973 A JP 129973A JP 129973 A JP129973 A JP 129973A JP S4991177 A JPS4991177 A JP S4991177A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP129973A JPS4991177A (ja) | 1972-12-29 | 1972-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP129973A JPS4991177A (ja) | 1972-12-29 | 1972-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4991177A true JPS4991177A (ja) | 1974-08-30 |
Family
ID=11497579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP129973A Pending JPS4991177A (ja) | 1972-12-29 | 1972-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4991177A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5251203A (en) * | 1975-10-20 | 1977-04-25 | Matsushita Electronics Corp | Photooetching method |
| JPS6055630A (ja) * | 1983-09-06 | 1985-03-30 | Oki Electric Ind Co Ltd | レジストパタ−ンの形成方法 |
| JPS61220328A (ja) * | 1985-03-22 | 1986-09-30 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | リフト・オフ・マスクの製造方法 |
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1972
- 1972-12-29 JP JP129973A patent/JPS4991177A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5251203A (en) * | 1975-10-20 | 1977-04-25 | Matsushita Electronics Corp | Photooetching method |
| JPS5424296B2 (ja) * | 1975-10-20 | 1979-08-20 | ||
| JPS6055630A (ja) * | 1983-09-06 | 1985-03-30 | Oki Electric Ind Co Ltd | レジストパタ−ンの形成方法 |
| JPH0335654B2 (ja) * | 1983-09-06 | 1991-05-29 | Oki Electric Ind Co Ltd | |
| JPS61220328A (ja) * | 1985-03-22 | 1986-09-30 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | リフト・オフ・マスクの製造方法 |
| JPH033378B2 (ja) * | 1985-03-22 | 1991-01-18 | Intaanashonaru Bijinesu Mashiinzu Corp |