JPS5424296B2 - - Google Patents
Info
- Publication number
- JPS5424296B2 JPS5424296B2 JP12652475A JP12652475A JPS5424296B2 JP S5424296 B2 JPS5424296 B2 JP S5424296B2 JP 12652475 A JP12652475 A JP 12652475A JP 12652475 A JP12652475 A JP 12652475A JP S5424296 B2 JPS5424296 B2 JP S5424296B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12652475A JPS5251203A (en) | 1975-10-20 | 1975-10-20 | Photooetching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12652475A JPS5251203A (en) | 1975-10-20 | 1975-10-20 | Photooetching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5251203A JPS5251203A (en) | 1977-04-25 |
JPS5424296B2 true JPS5424296B2 (ja) | 1979-08-20 |
Family
ID=14937328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12652475A Granted JPS5251203A (en) | 1975-10-20 | 1975-10-20 | Photooetching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5251203A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4991177A (ja) * | 1972-12-29 | 1974-08-30 |
-
1975
- 1975-10-20 JP JP12652475A patent/JPS5251203A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4991177A (ja) * | 1972-12-29 | 1974-08-30 |
Also Published As
Publication number | Publication date |
---|---|
JPS5251203A (en) | 1977-04-25 |