JPS4989479A - - Google Patents

Info

Publication number
JPS4989479A
JPS4989479A JP12951572A JP12951572A JPS4989479A JP S4989479 A JPS4989479 A JP S4989479A JP 12951572 A JP12951572 A JP 12951572A JP 12951572 A JP12951572 A JP 12951572A JP S4989479 A JPS4989479 A JP S4989479A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12951572A
Other languages
Japanese (ja)
Other versions
JPS5318315B2 (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12951572A priority Critical patent/JPS5318315B2/ja
Publication of JPS4989479A publication Critical patent/JPS4989479A/ja
Publication of JPS5318315B2 publication Critical patent/JPS5318315B2/ja
Expired legal-status Critical Current

Links

JP12951572A 1972-12-26 1972-12-26 Expired JPS5318315B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12951572A JPS5318315B2 (xx) 1972-12-26 1972-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12951572A JPS5318315B2 (xx) 1972-12-26 1972-12-26

Publications (2)

Publication Number Publication Date
JPS4989479A true JPS4989479A (xx) 1974-08-27
JPS5318315B2 JPS5318315B2 (xx) 1978-06-14

Family

ID=15011389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12951572A Expired JPS5318315B2 (xx) 1972-12-26 1972-12-26

Country Status (1)

Country Link
JP (1) JPS5318315B2 (xx)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551172A (en) * 1979-03-19 1980-01-07 Semiconductor Res Found Chemical semiconductor apparatus
JPS5643723A (en) * 1979-09-18 1981-04-22 Nec Corp Manufacture of semiconductor element
JPS6074538A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd 半導体素子の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551172A (en) * 1979-03-19 1980-01-07 Semiconductor Res Found Chemical semiconductor apparatus
JPS5643723A (en) * 1979-09-18 1981-04-22 Nec Corp Manufacture of semiconductor element
JPS6074538A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd 半導体素子の製造方法

Also Published As

Publication number Publication date
JPS5318315B2 (xx) 1978-06-14

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