JPS4989479A - - Google Patents

Info

Publication number
JPS4989479A
JPS4989479A JP12951572A JP12951572A JPS4989479A JP S4989479 A JPS4989479 A JP S4989479A JP 12951572 A JP12951572 A JP 12951572A JP 12951572 A JP12951572 A JP 12951572A JP S4989479 A JPS4989479 A JP S4989479A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12951572A
Other languages
Japanese (ja)
Other versions
JPS5318315B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12951572A priority Critical patent/JPS5318315B2/ja
Publication of JPS4989479A publication Critical patent/JPS4989479A/ja
Publication of JPS5318315B2 publication Critical patent/JPS5318315B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Weting (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP12951572A 1972-12-26 1972-12-26 Expired JPS5318315B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12951572A JPS5318315B2 (cg-RX-API-DMAC7.html) 1972-12-26 1972-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12951572A JPS5318315B2 (cg-RX-API-DMAC7.html) 1972-12-26 1972-12-26

Publications (2)

Publication Number Publication Date
JPS4989479A true JPS4989479A (cg-RX-API-DMAC7.html) 1974-08-27
JPS5318315B2 JPS5318315B2 (cg-RX-API-DMAC7.html) 1978-06-14

Family

ID=15011389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12951572A Expired JPS5318315B2 (cg-RX-API-DMAC7.html) 1972-12-26 1972-12-26

Country Status (1)

Country Link
JP (1) JPS5318315B2 (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551172A (en) * 1979-03-19 1980-01-07 Semiconductor Res Found Chemical semiconductor apparatus
JPS5643723A (en) * 1979-09-18 1981-04-22 Nec Corp Manufacture of semiconductor element
JPS6074538A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd 半導体素子の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551172A (en) * 1979-03-19 1980-01-07 Semiconductor Res Found Chemical semiconductor apparatus
JPS5643723A (en) * 1979-09-18 1981-04-22 Nec Corp Manufacture of semiconductor element
JPS6074538A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd 半導体素子の製造方法

Also Published As

Publication number Publication date
JPS5318315B2 (cg-RX-API-DMAC7.html) 1978-06-14

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