JPS4986980A - - Google Patents
Info
- Publication number
- JPS4986980A JPS4986980A JP262173A JP262173A JPS4986980A JP S4986980 A JPS4986980 A JP S4986980A JP 262173 A JP262173 A JP 262173A JP 262173 A JP262173 A JP 262173A JP S4986980 A JPS4986980 A JP S4986980A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Emergency Alarm Devices (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP262173A JPS4986980A (de) | 1972-12-23 | 1972-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP262173A JPS4986980A (de) | 1972-12-23 | 1972-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4986980A true JPS4986980A (de) | 1974-08-20 |
Family
ID=11534466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP262173A Pending JPS4986980A (de) | 1972-12-23 | 1972-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4986980A (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60104633A (ja) * | 1983-06-09 | 1985-06-10 | パウル・コツヒエル アクチエンゲゼルシヤフト | 錐の位置を定めるための方法と装置 |
| CN108180836A (zh) * | 2014-06-27 | 2018-06-19 | 佳能株式会社 | 位置检测装置 |
| JP2018138927A (ja) * | 2014-06-27 | 2018-09-06 | キヤノン株式会社 | 位置検出装置、位置検出方法、インプリント装置及び物品の製造方法 |
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1972
- 1972-12-23 JP JP262173A patent/JPS4986980A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60104633A (ja) * | 1983-06-09 | 1985-06-10 | パウル・コツヒエル アクチエンゲゼルシヤフト | 錐の位置を定めるための方法と装置 |
| CN108180836A (zh) * | 2014-06-27 | 2018-06-19 | 佳能株式会社 | 位置检测装置 |
| JP2018138927A (ja) * | 2014-06-27 | 2018-09-06 | キヤノン株式会社 | 位置検出装置、位置検出方法、インプリント装置及び物品の製造方法 |
| US10337856B2 (en) | 2014-06-27 | 2019-07-02 | Canon Kabushiki Kaisha | Position detection apparatus, position detection method, imprint apparatus, and method of manufacturing article |
| US10989527B2 (en) | 2014-06-27 | 2021-04-27 | Canon Kabushiki Kaisha | Position detection apparatus, position detection method, imprint apparatus, and method of manufacturing article |