JPS4982967A - - Google Patents
Info
- Publication number
- JPS4982967A JPS4982967A JP47126280A JP12628072A JPS4982967A JP S4982967 A JPS4982967 A JP S4982967A JP 47126280 A JP47126280 A JP 47126280A JP 12628072 A JP12628072 A JP 12628072A JP S4982967 A JPS4982967 A JP S4982967A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12628072A JPS5729877B2 (en:Method) | 1972-12-18 | 1972-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12628072A JPS5729877B2 (en:Method) | 1972-12-18 | 1972-12-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4982967A true JPS4982967A (en:Method) | 1974-08-09 |
| JPS5729877B2 JPS5729877B2 (en:Method) | 1982-06-25 |
Family
ID=14931290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12628072A Expired JPS5729877B2 (en:Method) | 1972-12-18 | 1972-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5729877B2 (en:Method) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011039058A (ja) * | 2009-08-18 | 2011-02-24 | Multitest Elektronische Systeme Gmbh | 整列固定具の電子コンポーネント受け入れ体積の下に延在する、電子コンポーネントをクランプする弾性ユニット |
| JP2013166966A (ja) * | 2012-02-14 | 2013-08-29 | Mitsubishi Electric Corp | ウェハ保持構造およびそれを備えた蒸着装置 |
| US8683680B2 (en) | 2009-08-18 | 2014-04-01 | Multitest Elektronische Systeme Gmbh | Align fixture for alignment of an electronic component |
| US8689436B2 (en) | 2009-08-18 | 2014-04-08 | Multitest Elektronische Systeme Gmbh | Two abutting sections of an align fixture together floatingly engaging an electronic component |
| US9255965B2 (en) | 2009-08-18 | 2016-02-09 | Multitest Elektronische Systeme Gmbh | System for post-processsing of electronic components |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162908A (ja) * | 1987-12-19 | 1989-06-27 | Toshiba Corp | 人検知センサ付機器の運転制御装置 |
-
1972
- 1972-12-18 JP JP12628072A patent/JPS5729877B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011039058A (ja) * | 2009-08-18 | 2011-02-24 | Multitest Elektronische Systeme Gmbh | 整列固定具の電子コンポーネント受け入れ体積の下に延在する、電子コンポーネントをクランプする弾性ユニット |
| CN101995493A (zh) * | 2009-08-18 | 2011-03-30 | 综合测试电子系统有限公司 | 用于夹持电子部件并在调准夹具的电子部件接收容积的下方延伸的弹性单元 |
| US8683680B2 (en) | 2009-08-18 | 2014-04-01 | Multitest Elektronische Systeme Gmbh | Align fixture for alignment of an electronic component |
| US8689436B2 (en) | 2009-08-18 | 2014-04-08 | Multitest Elektronische Systeme Gmbh | Two abutting sections of an align fixture together floatingly engaging an electronic component |
| US8964404B2 (en) | 2009-08-18 | 2015-02-24 | Multitest Elektronische Systeme Gmbh | Elastic unit for clamping an electronic component and extending below an electronic component receiving volume of an align fixture |
| US9255965B2 (en) | 2009-08-18 | 2016-02-09 | Multitest Elektronische Systeme Gmbh | System for post-processsing of electronic components |
| JP2013166966A (ja) * | 2012-02-14 | 2013-08-29 | Mitsubishi Electric Corp | ウェハ保持構造およびそれを備えた蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5729877B2 (en:Method) | 1982-06-25 |