JPS4981284A - - Google Patents
Info
- Publication number
- JPS4981284A JPS4981284A JP12472972A JP12472972A JPS4981284A JP S4981284 A JPS4981284 A JP S4981284A JP 12472972 A JP12472972 A JP 12472972A JP 12472972 A JP12472972 A JP 12472972A JP S4981284 A JPS4981284 A JP S4981284A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12472972A JPS5141031B2 (ru) | 1972-12-14 | 1972-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12472972A JPS5141031B2 (ru) | 1972-12-14 | 1972-12-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4981284A true JPS4981284A (ru) | 1974-08-06 |
| JPS5141031B2 JPS5141031B2 (ru) | 1976-11-08 |
Family
ID=14892649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12472972A Expired JPS5141031B2 (ru) | 1972-12-14 | 1972-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5141031B2 (ru) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62211371A (ja) * | 1986-03-11 | 1987-09-17 | Matsushita Electric Ind Co Ltd | スパツタリング装置 |
| JPS62211372A (ja) * | 1986-03-11 | 1987-09-17 | Matsushita Electric Ind Co Ltd | スパツタリング装置 |
| JPH0353066A (ja) * | 1989-07-20 | 1991-03-07 | Sekiyu Kodan | スパッタリング装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7369411B1 (ja) * | 2023-02-28 | 2023-10-26 | 株式会社アドバンスト・スパッタテック | スパッタリング成膜源および成膜装置 |
-
1972
- 1972-12-14 JP JP12472972A patent/JPS5141031B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62211371A (ja) * | 1986-03-11 | 1987-09-17 | Matsushita Electric Ind Co Ltd | スパツタリング装置 |
| JPS62211372A (ja) * | 1986-03-11 | 1987-09-17 | Matsushita Electric Ind Co Ltd | スパツタリング装置 |
| JPH0353066A (ja) * | 1989-07-20 | 1991-03-07 | Sekiyu Kodan | スパッタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5141031B2 (ru) | 1976-11-08 |