JPS4979525A - - Google Patents
Info
- Publication number
- JPS4979525A JPS4979525A JP12003673A JP12003673A JPS4979525A JP S4979525 A JPS4979525 A JP S4979525A JP 12003673 A JP12003673 A JP 12003673A JP 12003673 A JP12003673 A JP 12003673A JP S4979525 A JPS4979525 A JP S4979525A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US30623472A | 1972-11-13 | 1972-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4979525A true JPS4979525A (fr) | 1974-08-01 |
Family
ID=23184410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12003673A Pending JPS4979525A (fr) | 1972-11-13 | 1973-10-26 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS4979525A (fr) |
| CA (1) | CA1286905C (fr) |
| DE (1) | DE2355701A1 (fr) |
| FR (1) | FR2206527B1 (fr) |
| GB (1) | GB1421805A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63502936A (ja) * | 1986-03-24 | 1988-10-27 | アメリカン テレフォン アンド テレグラフ カムパニー | 集積回路デバイス製作のためのパターン転写プロセス |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3893127A (en) * | 1973-09-27 | 1975-07-01 | Rca Corp | Electron beam recording media |
| DE19917790A1 (de) * | 1999-04-20 | 2000-11-02 | Hoechst Trespaphan Gmbh | Biaxial orientierte Folie für die Herstellung von Keramikkondensatoren |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4942352A (fr) * | 1972-05-01 | 1974-04-20 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3535137A (en) * | 1967-01-13 | 1970-10-20 | Ibm | Method of fabricating etch resistant masks |
-
1973
- 1973-08-31 GB GB4110673A patent/GB1421805A/en not_active Expired
- 1973-09-19 FR FR7334210A patent/FR2206527B1/fr not_active Expired
- 1973-10-26 CA CA 184354 patent/CA1286905C/fr not_active Expired - Fee Related
- 1973-10-26 JP JP12003673A patent/JPS4979525A/ja active Pending
- 1973-11-07 DE DE19732355701 patent/DE2355701A1/de active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4942352A (fr) * | 1972-05-01 | 1974-04-20 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63502936A (ja) * | 1986-03-24 | 1988-10-27 | アメリカン テレフォン アンド テレグラフ カムパニー | 集積回路デバイス製作のためのパターン転写プロセス |
Also Published As
| Publication number | Publication date |
|---|---|
| CA1286905C (fr) | 1991-07-30 |
| FR2206527A1 (fr) | 1974-06-07 |
| GB1421805A (en) | 1976-01-21 |
| DE2355701A1 (de) | 1974-05-16 |
| FR2206527B1 (fr) | 1978-01-13 |