JPS4978860A - - Google Patents

Info

Publication number
JPS4978860A
JPS4978860A JP12335172A JP12335172A JPS4978860A JP S4978860 A JPS4978860 A JP S4978860A JP 12335172 A JP12335172 A JP 12335172A JP 12335172 A JP12335172 A JP 12335172A JP S4978860 A JPS4978860 A JP S4978860A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12335172A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12335172A priority Critical patent/JPS4978860A/ja
Publication of JPS4978860A publication Critical patent/JPS4978860A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Voltage And Current In General (AREA)
JP12335172A 1972-12-11 1972-12-11 Pending JPS4978860A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12335172A JPS4978860A (ja) 1972-12-11 1972-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12335172A JPS4978860A (ja) 1972-12-11 1972-12-11

Publications (1)

Publication Number Publication Date
JPS4978860A true JPS4978860A (ja) 1974-07-30

Family

ID=14858405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12335172A Pending JPS4978860A (ja) 1972-12-11 1972-12-11

Country Status (1)

Country Link
JP (1) JPS4978860A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55144777A (en) * 1979-04-25 1980-11-11 Hitachi Ltd Thyristor power control system
JPH02171811A (ja) * 1988-10-31 1990-07-03 Nixdorf Comput Ag 電力分配式電源系
JP2007082290A (ja) * 2005-09-12 2007-03-29 Origin Electric Co Ltd 成膜装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55144777A (en) * 1979-04-25 1980-11-11 Hitachi Ltd Thyristor power control system
JPS6212748B2 (ja) * 1979-04-25 1987-03-20 Hitachi Ltd
JPH02171811A (ja) * 1988-10-31 1990-07-03 Nixdorf Comput Ag 電力分配式電源系
JP2007082290A (ja) * 2005-09-12 2007-03-29 Origin Electric Co Ltd 成膜装置
JP4668746B2 (ja) * 2005-09-12 2011-04-13 オリジン電気株式会社 成膜装置

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