JPS4977885A - - Google Patents
Info
- Publication number
- JPS4977885A JPS4977885A JP11896372A JP11896372A JPS4977885A JP S4977885 A JPS4977885 A JP S4977885A JP 11896372 A JP11896372 A JP 11896372A JP 11896372 A JP11896372 A JP 11896372A JP S4977885 A JPS4977885 A JP S4977885A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Extraction Or Liquid Replacement (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11896372A JPS511668B2 (pm) | 1972-11-29 | 1972-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11896372A JPS511668B2 (pm) | 1972-11-29 | 1972-11-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4977885A true JPS4977885A (pm) | 1974-07-26 |
| JPS511668B2 JPS511668B2 (pm) | 1976-01-19 |
Family
ID=14749596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11896372A Expired JPS511668B2 (pm) | 1972-11-29 | 1972-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS511668B2 (pm) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014505591A (ja) * | 2011-01-28 | 2014-03-06 | キャタセル コーポレーション | 反応装置および積み重ね可能な構造の反応装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53141574A (en) * | 1977-05-16 | 1978-12-09 | Nec Corp | Manufacture of semiconductor device |
-
1972
- 1972-11-29 JP JP11896372A patent/JPS511668B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014505591A (ja) * | 2011-01-28 | 2014-03-06 | キャタセル コーポレーション | 反応装置および積み重ね可能な構造の反応装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS511668B2 (pm) | 1976-01-19 |