JPS4977885A - - Google Patents

Info

Publication number
JPS4977885A
JPS4977885A JP11896372A JP11896372A JPS4977885A JP S4977885 A JPS4977885 A JP S4977885A JP 11896372 A JP11896372 A JP 11896372A JP 11896372 A JP11896372 A JP 11896372A JP S4977885 A JPS4977885 A JP S4977885A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11896372A
Other languages
Japanese (ja)
Other versions
JPS511668B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11896372A priority Critical patent/JPS511668B2/ja
Publication of JPS4977885A publication Critical patent/JPS4977885A/ja
Publication of JPS511668B2 publication Critical patent/JPS511668B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Extraction Or Liquid Replacement (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP11896372A 1972-11-29 1972-11-29 Expired JPS511668B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11896372A JPS511668B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-11-29 1972-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11896372A JPS511668B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-11-29 1972-11-29

Publications (2)

Publication Number Publication Date
JPS4977885A true JPS4977885A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-07-26
JPS511668B2 JPS511668B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-01-19

Family

ID=14749596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11896372A Expired JPS511668B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-11-29 1972-11-29

Country Status (1)

Country Link
JP (1) JPS511668B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014505591A (ja) * 2011-01-28 2014-03-06 キャタセル コーポレーション 反応装置および積み重ね可能な構造の反応装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53141574A (en) * 1977-05-16 1978-12-09 Nec Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014505591A (ja) * 2011-01-28 2014-03-06 キャタセル コーポレーション 反応装置および積み重ね可能な構造の反応装置

Also Published As

Publication number Publication date
JPS511668B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-01-19

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