JPS4973385A - - Google Patents
Info
- Publication number
- JPS4973385A JPS4973385A JP11442072A JP11442072A JPS4973385A JP S4973385 A JPS4973385 A JP S4973385A JP 11442072 A JP11442072 A JP 11442072A JP 11442072 A JP11442072 A JP 11442072A JP S4973385 A JPS4973385 A JP S4973385A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47114420A JPS5120393B2 (el) | 1972-11-15 | 1972-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47114420A JPS5120393B2 (el) | 1972-11-15 | 1972-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4973385A true JPS4973385A (el) | 1974-07-16 |
| JPS5120393B2 JPS5120393B2 (el) | 1976-06-24 |
Family
ID=14637249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47114420A Expired JPS5120393B2 (el) | 1972-11-15 | 1972-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5120393B2 (el) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS531140A (en) * | 1976-06-25 | 1978-01-07 | Ulvac Corp | Method of coating inner surface of tube using energy source for heating |
| JPS5331581A (en) * | 1976-09-07 | 1978-03-24 | Ulvac Corp | Coating method of tube inside by ion beam |
| JPS6283464A (ja) * | 1985-10-04 | 1987-04-16 | Sumitomo Electric Ind Ltd | 筒状部材内面被覆方法および装置 |
| WO2002053795A1 (fr) * | 2000-12-27 | 2002-07-11 | Advantest Corporation | Procede et dispositif d'application, dispositif d'exposition a un faisceau electronique, dispositif deflecteur et procede de production du dispositif deflecteur |
-
1972
- 1972-11-15 JP JP47114420A patent/JPS5120393B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS531140A (en) * | 1976-06-25 | 1978-01-07 | Ulvac Corp | Method of coating inner surface of tube using energy source for heating |
| JPS5331581A (en) * | 1976-09-07 | 1978-03-24 | Ulvac Corp | Coating method of tube inside by ion beam |
| JPS5515546B2 (el) * | 1976-09-07 | 1980-04-24 | ||
| JPS6283464A (ja) * | 1985-10-04 | 1987-04-16 | Sumitomo Electric Ind Ltd | 筒状部材内面被覆方法および装置 |
| JPH0210860B2 (el) * | 1985-10-04 | 1990-03-09 | Sumitomo Electric Industries | |
| WO2002053795A1 (fr) * | 2000-12-27 | 2002-07-11 | Advantest Corporation | Procede et dispositif d'application, dispositif d'exposition a un faisceau electronique, dispositif deflecteur et procede de production du dispositif deflecteur |
| JP4684414B2 (ja) * | 2000-12-27 | 2011-05-18 | 株式会社アドバンテスト | 蒸着装置、蒸着方法、電子ビーム露光装置、偏向装置及び偏向装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5120393B2 (el) | 1976-06-24 |