JPS4967880A - - Google Patents
Info
- Publication number
- JPS4967880A JPS4967880A JP10941972A JP10941972A JPS4967880A JP S4967880 A JPS4967880 A JP S4967880A JP 10941972 A JP10941972 A JP 10941972A JP 10941972 A JP10941972 A JP 10941972A JP S4967880 A JPS4967880 A JP S4967880A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10941972A JPS4967880A (de) | 1972-11-02 | 1972-11-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10941972A JPS4967880A (de) | 1972-11-02 | 1972-11-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4967880A true JPS4967880A (de) | 1974-07-01 |
Family
ID=14509756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10941972A Pending JPS4967880A (de) | 1972-11-02 | 1972-11-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4967880A (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53106758U (de) * | 1976-06-23 | 1978-08-28 | ||
JPS58145117A (ja) * | 1982-02-23 | 1983-08-29 | Toshiba Corp | 半導体製造装置 |
JPH02279589A (ja) * | 1989-04-19 | 1990-11-15 | Sumitomo Metal Ind Ltd | 気相成長装置 |
JP2010219345A (ja) * | 2009-03-17 | 2010-09-30 | Sharp Corp | 気相成長装置及び気相成長方法 |
-
1972
- 1972-11-02 JP JP10941972A patent/JPS4967880A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53106758U (de) * | 1976-06-23 | 1978-08-28 | ||
JPS58145117A (ja) * | 1982-02-23 | 1983-08-29 | Toshiba Corp | 半導体製造装置 |
JPH02279589A (ja) * | 1989-04-19 | 1990-11-15 | Sumitomo Metal Ind Ltd | 気相成長装置 |
JP2010219345A (ja) * | 2009-03-17 | 2010-09-30 | Sharp Corp | 気相成長装置及び気相成長方法 |