JPS4965993A - - Google Patents
Info
- Publication number
- JPS4965993A JPS4965993A JP10916972A JP10916972A JPS4965993A JP S4965993 A JPS4965993 A JP S4965993A JP 10916972 A JP10916972 A JP 10916972A JP 10916972 A JP10916972 A JP 10916972A JP S4965993 A JPS4965993 A JP S4965993A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10916972A JPS5219549B2 (enExample) | 1972-10-30 | 1972-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10916972A JPS5219549B2 (enExample) | 1972-10-30 | 1972-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4965993A true JPS4965993A (enExample) | 1974-06-26 |
| JPS5219549B2 JPS5219549B2 (enExample) | 1977-05-28 |
Family
ID=14503390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10916972A Expired JPS5219549B2 (enExample) | 1972-10-30 | 1972-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5219549B2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03150288A (ja) * | 1989-11-02 | 1991-06-26 | Osaka Titanium Co Ltd | 多結晶シリコンの加熱装置 |
| JP2011513182A (ja) * | 2008-03-04 | 2011-04-28 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | シラン（ＳｉＨ４）を再循環させる方法 |
-
1972
- 1972-10-30 JP JP10916972A patent/JPS5219549B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03150288A (ja) * | 1989-11-02 | 1991-06-26 | Osaka Titanium Co Ltd | 多結晶シリコンの加熱装置 |
| JP2011513182A (ja) * | 2008-03-04 | 2011-04-28 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | シラン（ＳｉＨ４）を再循環させる方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5219549B2 (enExample) | 1977-05-28 |