JPS5219549B2 - - Google Patents
Info
- Publication number
- JPS5219549B2 JPS5219549B2 JP10916972A JP10916972A JPS5219549B2 JP S5219549 B2 JPS5219549 B2 JP S5219549B2 JP 10916972 A JP10916972 A JP 10916972A JP 10916972 A JP10916972 A JP 10916972A JP S5219549 B2 JPS5219549 B2 JP S5219549B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10916972A JPS5219549B2 (ja) | 1972-10-30 | 1972-10-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10916972A JPS5219549B2 (ja) | 1972-10-30 | 1972-10-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4965993A JPS4965993A (ja) | 1974-06-26 |
JPS5219549B2 true JPS5219549B2 (ja) | 1977-05-28 |
Family
ID=14503390
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10916972A Expired JPS5219549B2 (ja) | 1972-10-30 | 1972-10-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5219549B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2528367B2 (ja) * | 1989-11-02 | 1996-08-28 | 住友シチックス株式会社 | 多結晶シリコンの加熱装置 |
FR2933714B1 (fr) * | 2008-07-11 | 2011-05-06 | Air Liquide | Procede de recyclage de silane (sih4) |
-
1972
- 1972-10-30 JP JP10916972A patent/JPS5219549B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4965993A (ja) | 1974-06-26 |