JPS4964364A - - Google Patents
Info
- Publication number
- JPS4964364A JPS4964364A JP10554672A JP10554672A JPS4964364A JP S4964364 A JPS4964364 A JP S4964364A JP 10554672 A JP10554672 A JP 10554672A JP 10554672 A JP10554672 A JP 10554672A JP S4964364 A JPS4964364 A JP S4964364A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10554672A JPS5625743B2 (da) | 1972-10-21 | 1972-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10554672A JPS5625743B2 (da) | 1972-10-21 | 1972-10-21 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1524482A Division JPS6052540B2 (ja) | 1982-02-01 | 1982-02-01 | 電子顕微鏡の焦点合せ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4964364A true JPS4964364A (da) | 1974-06-21 |
| JPS5625743B2 JPS5625743B2 (da) | 1981-06-15 |
Family
ID=14410567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10554672A Expired JPS5625743B2 (da) | 1972-10-21 | 1972-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5625743B2 (da) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5439684A (en) * | 1977-09-05 | 1979-03-27 | Jeol Ltd | Control apparatus of charged particle probe diameters |
| JPS5559232U (da) * | 1978-10-19 | 1980-04-22 | ||
| JPS5814460A (ja) * | 1981-07-17 | 1983-01-27 | Internatl Precision Inc | 電子顕微鏡の焦点合わせ方法及びこの方法を応用した像撮影方法及び装置 |
| JPS58102455A (ja) * | 1981-12-11 | 1983-06-18 | Jeol Ltd | 電子顕微鏡 |
| JPS6338250U (da) * | 1986-08-29 | 1988-03-11 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58145349U (ja) * | 1982-03-20 | 1983-09-30 | 新和機械工業株式会社 | 溝掘削用土留装置 |
| JPS6092590U (ja) * | 1983-11-30 | 1985-06-24 | 株式会社タカラ | 回転走行路 |
-
1972
- 1972-10-21 JP JP10554672A patent/JPS5625743B2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5439684A (en) * | 1977-09-05 | 1979-03-27 | Jeol Ltd | Control apparatus of charged particle probe diameters |
| JPS5812702B2 (ja) * | 1977-09-05 | 1983-03-09 | 日本電子株式会社 | 荷電粒子プロ−ブ径の制御装置 |
| JPS5559232U (da) * | 1978-10-19 | 1980-04-22 | ||
| JPS5814460A (ja) * | 1981-07-17 | 1983-01-27 | Internatl Precision Inc | 電子顕微鏡の焦点合わせ方法及びこの方法を応用した像撮影方法及び装置 |
| JPS58102455A (ja) * | 1981-12-11 | 1983-06-18 | Jeol Ltd | 電子顕微鏡 |
| JPS6338250U (da) * | 1986-08-29 | 1988-03-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5625743B2 (da) | 1981-06-15 |