JPS4960683A - - Google Patents
Info
- Publication number
- JPS4960683A JPS4960683A JP10188972A JP10188972A JPS4960683A JP S4960683 A JPS4960683 A JP S4960683A JP 10188972 A JP10188972 A JP 10188972A JP 10188972 A JP10188972 A JP 10188972A JP S4960683 A JPS4960683 A JP S4960683A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10188972A JPS5336759B2 (https=) | 1972-10-13 | 1972-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10188972A JPS5336759B2 (https=) | 1972-10-13 | 1972-10-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4960683A true JPS4960683A (https=) | 1974-06-12 |
| JPS5336759B2 JPS5336759B2 (https=) | 1978-10-04 |
Family
ID=14312485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10188972A Expired JPS5336759B2 (https=) | 1972-10-13 | 1972-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5336759B2 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53144270A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Projection-type mask aligner |
| JPS54101676A (en) * | 1978-01-16 | 1979-08-10 | Rca Corp | Method of and device for aligning photo mask |
| JPS5743232A (en) * | 1980-07-02 | 1982-03-11 | Yokogawa Hewlett Packard Ltd | Data compression device |
| JPS6029834A (ja) * | 1983-07-06 | 1985-02-15 | Fuji Electric Co Ltd | デ−タ処理方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57145336U (https=) * | 1981-12-28 | 1982-09-13 | ||
| JPS60161944U (ja) * | 1985-02-04 | 1985-10-28 | タイガー魔法瓶株式会社 | ポンプ注液式液体容器 |
-
1972
- 1972-10-13 JP JP10188972A patent/JPS5336759B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53144270A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Projection-type mask aligner |
| JPS54101676A (en) * | 1978-01-16 | 1979-08-10 | Rca Corp | Method of and device for aligning photo mask |
| JPS5743232A (en) * | 1980-07-02 | 1982-03-11 | Yokogawa Hewlett Packard Ltd | Data compression device |
| JPS6029834A (ja) * | 1983-07-06 | 1985-02-15 | Fuji Electric Co Ltd | デ−タ処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5336759B2 (https=) | 1978-10-04 |