JPS4959526A - - Google Patents
Info
- Publication number
- JPS4959526A JPS4959526A JP6647973A JP6647973A JPS4959526A JP S4959526 A JPS4959526 A JP S4959526A JP 6647973 A JP6647973 A JP 6647973A JP 6647973 A JP6647973 A JP 6647973A JP S4959526 A JPS4959526 A JP S4959526A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
- G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Automation & Control Theory (AREA)
- Electron Sources, Ion Sources (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26828472A | 1972-07-03 | 1972-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4959526A true JPS4959526A (hu) | 1974-06-10 |
Family
ID=23022270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6647973A Pending JPS4959526A (hu) | 1972-07-03 | 1973-06-14 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS4959526A (hu) |
| CA (1) | CA982234A (hu) |
| DE (1) | DE2332604A1 (hu) |
| FR (1) | FR2191258B1 (hu) |
| IT (1) | IT988681B (hu) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008271559A (ja) * | 2007-04-19 | 2008-11-06 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | 環状コンタクト付き多層トランスデューサ |
| US10129656B2 (en) | 2009-01-30 | 2018-11-13 | Avago Technologies International Sales Pte. Limited | Active temperature control of piezoelectric membrane-based micro-electromechanical devices |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE24794T1 (de) * | 1981-10-21 | 1987-01-15 | Hell Rudolf Dr Ing Gmbh | Hochkonstanter strahlerzeuger fuer geladene teilchen. |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE221138C (hu) * | 1971-04-30 |
-
1973
- 1973-05-25 IT IT2457673A patent/IT988681B/it active
- 1973-06-13 FR FR7322359A patent/FR2191258B1/fr not_active Expired
- 1973-06-14 JP JP6647973A patent/JPS4959526A/ja active Pending
- 1973-06-19 CA CA174,374A patent/CA982234A/en not_active Expired
- 1973-06-27 DE DE19732332604 patent/DE2332604A1/de active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008271559A (ja) * | 2007-04-19 | 2008-11-06 | Avago Technologies Wireless Ip (Singapore) Pte Ltd | 環状コンタクト付き多層トランスデューサ |
| US10129656B2 (en) | 2009-01-30 | 2018-11-13 | Avago Technologies International Sales Pte. Limited | Active temperature control of piezoelectric membrane-based micro-electromechanical devices |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2191258A1 (hu) | 1974-02-01 |
| FR2191258B1 (hu) | 1976-05-28 |
| CA982234A (en) | 1976-01-20 |
| DE2332604A1 (de) | 1974-01-24 |
| IT988681B (it) | 1975-04-30 |