FR2191258B1 - - Google Patents

Info

Publication number
FR2191258B1
FR2191258B1 FR7322359A FR7322359A FR2191258B1 FR 2191258 B1 FR2191258 B1 FR 2191258B1 FR 7322359 A FR7322359 A FR 7322359A FR 7322359 A FR7322359 A FR 7322359A FR 2191258 B1 FR2191258 B1 FR 2191258B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7322359A
Other versions
FR2191258A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2191258A1 publication Critical patent/FR2191258A1/fr
Application granted granted Critical
Publication of FR2191258B1 publication Critical patent/FR2191258B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
FR7322359A 1972-07-03 1973-06-13 Expired FR2191258B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26828472A 1972-07-03 1972-07-03

Publications (2)

Publication Number Publication Date
FR2191258A1 FR2191258A1 (fr) 1974-02-01
FR2191258B1 true FR2191258B1 (fr) 1976-05-28

Family

ID=23022270

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7322359A Expired FR2191258B1 (fr) 1972-07-03 1973-06-13

Country Status (5)

Country Link
JP (1) JPS4959526A (fr)
CA (1) CA982234A (fr)
DE (1) DE2332604A1 (fr)
FR (1) FR2191258B1 (fr)
IT (1) IT988681B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE24794T1 (de) * 1981-10-21 1987-01-15 Hell Rudolf Dr Ing Gmbh Hochkonstanter strahlerzeuger fuer geladene teilchen.
US7538477B2 (en) * 2006-11-27 2009-05-26 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Multi-layer transducers with annular contacts
US10129656B2 (en) 2009-01-30 2018-11-13 Avago Technologies International Sales Pte. Limited Active temperature control of piezoelectric membrane-based micro-electromechanical devices

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (fr) * 1971-04-30

Also Published As

Publication number Publication date
DE2332604A1 (de) 1974-01-24
JPS4959526A (fr) 1974-06-10
CA982234A (en) 1976-01-20
IT988681B (it) 1975-04-30
FR2191258A1 (fr) 1974-02-01

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Legal Events

Date Code Title Description
ST Notification of lapse