JPS4954799A - - Google Patents

Info

Publication number
JPS4954799A
JPS4954799A JP4676973A JP4676973A JPS4954799A JP S4954799 A JPS4954799 A JP S4954799A JP 4676973 A JP4676973 A JP 4676973A JP 4676973 A JP4676973 A JP 4676973A JP S4954799 A JPS4954799 A JP S4954799A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4676973A
Other languages
Japanese (ja)
Other versions
JPS5418439B2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4954799A publication Critical patent/JPS4954799A/ja
Publication of JPS5418439B2 publication Critical patent/JPS5418439B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/063Geometrical arrangement of electrodes for beam-forming
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/002Devices involving relative movement between electronbeam and workpiece
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
JP4676973A 1972-04-26 1973-04-26 Expired JPS5418439B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH624972A CH551083A (de) 1972-04-26 1972-04-26 Elektronenstrahlerzeugungssystem zur materialbearbeitung.

Publications (2)

Publication Number Publication Date
JPS4954799A true JPS4954799A (de) 1974-05-28
JPS5418439B2 JPS5418439B2 (de) 1979-07-07

Family

ID=4306605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4676973A Expired JPS5418439B2 (de) 1972-04-26 1973-04-26

Country Status (6)

Country Link
JP (1) JPS5418439B2 (de)
CH (1) CH551083A (de)
DE (1) DE7312299U (de)
FR (1) FR2182047B1 (de)
GB (1) GB1373478A (de)
NL (1) NL152401B (de)

Also Published As

Publication number Publication date
NL7208078A (de) 1973-10-30
NL152401B (nl) 1977-02-15
JPS5418439B2 (de) 1979-07-07
DE2316257A1 (de) 1973-11-15
FR2182047A1 (de) 1973-12-07
DE7312299U (de) 1977-09-08
CH551083A (de) 1974-06-28
DE2316257B2 (de) 1975-03-27
GB1373478A (en) 1974-11-13
FR2182047B1 (de) 1978-06-23

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