JPS4954268A - - Google Patents

Info

Publication number
JPS4954268A
JPS4954268A JP47098450A JP9845072A JPS4954268A JP S4954268 A JPS4954268 A JP S4954268A JP 47098450 A JP47098450 A JP 47098450A JP 9845072 A JP9845072 A JP 9845072A JP S4954268 A JPS4954268 A JP S4954268A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47098450A
Other languages
Japanese (ja)
Other versions
JPS5641292B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9845072A priority Critical patent/JPS5641292B2/ja
Publication of JPS4954268A publication Critical patent/JPS4954268A/ja
Publication of JPS5641292B2 publication Critical patent/JPS5641292B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
JP9845072A 1972-09-30 1972-09-30 Expired JPS5641292B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9845072A JPS5641292B2 (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9845072A JPS5641292B2 (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Publications (2)

Publication Number Publication Date
JPS4954268A true JPS4954268A (enrdf_load_stackoverflow) 1974-05-27
JPS5641292B2 JPS5641292B2 (enrdf_load_stackoverflow) 1981-09-28

Family

ID=14220050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9845072A Expired JPS5641292B2 (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Country Status (1)

Country Link
JP (1) JPS5641292B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01288317A (ja) * 1987-06-19 1989-11-20 L'air Liquide 電子部品の製造に伴うガス状流出物の処理方法および該方法を実施するための焼却装置
JPH04290525A (ja) * 1991-03-19 1992-10-15 Ebara Infilco Co Ltd 排ガス処理方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01288317A (ja) * 1987-06-19 1989-11-20 L'air Liquide 電子部品の製造に伴うガス状流出物の処理方法および該方法を実施するための焼却装置
JPH04290525A (ja) * 1991-03-19 1992-10-15 Ebara Infilco Co Ltd 排ガス処理方法および装置

Also Published As

Publication number Publication date
JPS5641292B2 (enrdf_load_stackoverflow) 1981-09-28

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