JPS5641292B2 - - Google Patents

Info

Publication number
JPS5641292B2
JPS5641292B2 JP9845072A JP9845072A JPS5641292B2 JP S5641292 B2 JPS5641292 B2 JP S5641292B2 JP 9845072 A JP9845072 A JP 9845072A JP 9845072 A JP9845072 A JP 9845072A JP S5641292 B2 JPS5641292 B2 JP S5641292B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9845072A
Other languages
Japanese (ja)
Other versions
JPS4954268A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9845072A priority Critical patent/JPS5641292B2/ja
Publication of JPS4954268A publication Critical patent/JPS4954268A/ja
Publication of JPS5641292B2 publication Critical patent/JPS5641292B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
JP9845072A 1972-09-30 1972-09-30 Expired JPS5641292B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9845072A JPS5641292B2 (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9845072A JPS5641292B2 (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Publications (2)

Publication Number Publication Date
JPS4954268A JPS4954268A (enrdf_load_stackoverflow) 1974-05-27
JPS5641292B2 true JPS5641292B2 (enrdf_load_stackoverflow) 1981-09-28

Family

ID=14220050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9845072A Expired JPS5641292B2 (enrdf_load_stackoverflow) 1972-09-30 1972-09-30

Country Status (1)

Country Link
JP (1) JPS5641292B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2616884B1 (fr) * 1987-06-19 1991-05-10 Air Liquide Procede de traitement d'effluents gazeux provenant de la fabrication de composants electroniques et appareil d'incineration pour sa mise en oeuvre
JPH0767524B2 (ja) * 1991-03-19 1995-07-26 株式会社荏原製作所 排ガス処理方法および装置

Also Published As

Publication number Publication date
JPS4954268A (enrdf_load_stackoverflow) 1974-05-27

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