JPS4953039A - - Google Patents
Info
- Publication number
- JPS4953039A JPS4953039A JP5122073A JP5122073A JPS4953039A JP S4953039 A JPS4953039 A JP S4953039A JP 5122073 A JP5122073 A JP 5122073A JP 5122073 A JP5122073 A JP 5122073A JP S4953039 A JPS4953039 A JP S4953039A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00264653A US3815978A (en) | 1972-06-20 | 1972-06-20 | Durable see-through photoresist mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4953039A true JPS4953039A (enExample) | 1974-05-23 |
| JPS576102B2 JPS576102B2 (enExample) | 1982-02-03 |
Family
ID=23007027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5122073A Expired JPS576102B2 (enExample) | 1972-06-20 | 1973-05-10 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS576102B2 (enExample) |
| IT (1) | IT989000B (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57144550A (en) * | 1981-02-28 | 1982-09-07 | Dainippon Printing Co Ltd | Blank plate for photomask |
| JPS57182741A (en) * | 1981-05-07 | 1982-11-10 | Dainippon Printing Co Ltd | Photomask blank plate |
| JPS57182740A (en) * | 1981-05-07 | 1982-11-10 | Dainippon Printing Co Ltd | Photomask |
-
1973
- 1973-05-10 JP JP5122073A patent/JPS576102B2/ja not_active Expired
- 1973-06-12 IT IT25170/73A patent/IT989000B/it active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57144550A (en) * | 1981-02-28 | 1982-09-07 | Dainippon Printing Co Ltd | Blank plate for photomask |
| JPS57182741A (en) * | 1981-05-07 | 1982-11-10 | Dainippon Printing Co Ltd | Photomask blank plate |
| JPS57182740A (en) * | 1981-05-07 | 1982-11-10 | Dainippon Printing Co Ltd | Photomask |
Also Published As
| Publication number | Publication date |
|---|---|
| IT989000B (it) | 1975-04-30 |
| JPS576102B2 (enExample) | 1982-02-03 |