JPS4953039A - - Google Patents

Info

Publication number
JPS4953039A
JPS4953039A JP5122073A JP5122073A JPS4953039A JP S4953039 A JPS4953039 A JP S4953039A JP 5122073 A JP5122073 A JP 5122073A JP 5122073 A JP5122073 A JP 5122073A JP S4953039 A JPS4953039 A JP S4953039A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5122073A
Other languages
Japanese (ja)
Other versions
JPS576102B2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00264653A external-priority patent/US3815978A/en
Application filed filed Critical
Publication of JPS4953039A publication Critical patent/JPS4953039A/ja
Publication of JPS576102B2 publication Critical patent/JPS576102B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP5122073A 1972-06-20 1973-05-10 Expired JPS576102B2 (cg-RX-API-DMAC10.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00264653A US3815978A (en) 1972-06-20 1972-06-20 Durable see-through photoresist mask

Publications (2)

Publication Number Publication Date
JPS4953039A true JPS4953039A (cg-RX-API-DMAC10.html) 1974-05-23
JPS576102B2 JPS576102B2 (cg-RX-API-DMAC10.html) 1982-02-03

Family

ID=23007027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5122073A Expired JPS576102B2 (cg-RX-API-DMAC10.html) 1972-06-20 1973-05-10

Country Status (2)

Country Link
JP (1) JPS576102B2 (cg-RX-API-DMAC10.html)
IT (1) IT989000B (cg-RX-API-DMAC10.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57144550A (en) * 1981-02-28 1982-09-07 Dainippon Printing Co Ltd Blank plate for photomask
JPS57182740A (en) * 1981-05-07 1982-11-10 Dainippon Printing Co Ltd Photomask
JPS57182741A (en) * 1981-05-07 1982-11-10 Dainippon Printing Co Ltd Photomask blank plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57144550A (en) * 1981-02-28 1982-09-07 Dainippon Printing Co Ltd Blank plate for photomask
JPS57182740A (en) * 1981-05-07 1982-11-10 Dainippon Printing Co Ltd Photomask
JPS57182741A (en) * 1981-05-07 1982-11-10 Dainippon Printing Co Ltd Photomask blank plate

Also Published As

Publication number Publication date
IT989000B (it) 1975-04-30
JPS576102B2 (cg-RX-API-DMAC10.html) 1982-02-03

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