JPS494983A - - Google Patents

Info

Publication number
JPS494983A
JPS494983A JP47041318A JP4131872A JPS494983A JP S494983 A JPS494983 A JP S494983A JP 47041318 A JP47041318 A JP 47041318A JP 4131872 A JP4131872 A JP 4131872A JP S494983 A JPS494983 A JP S494983A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47041318A
Other languages
Japanese (ja)
Other versions
JPS5240831B2 (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47041318A priority Critical patent/JPS5240831B2/ja
Publication of JPS494983A publication Critical patent/JPS494983A/ja
Publication of JPS5240831B2 publication Critical patent/JPS5240831B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP47041318A 1972-04-26 1972-04-26 Expired JPS5240831B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47041318A JPS5240831B2 (xx) 1972-04-26 1972-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47041318A JPS5240831B2 (xx) 1972-04-26 1972-04-26

Publications (2)

Publication Number Publication Date
JPS494983A true JPS494983A (xx) 1974-01-17
JPS5240831B2 JPS5240831B2 (xx) 1977-10-14

Family

ID=12605148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47041318A Expired JPS5240831B2 (xx) 1972-04-26 1972-04-26

Country Status (1)

Country Link
JP (1) JPS5240831B2 (xx)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367365A (en) * 1976-11-29 1978-06-15 Nippon Telegr & Teleph Corp <Ntt> Correcting method for beam position
JPS53146575A (en) * 1977-05-27 1978-12-20 Nippon Telegr & Teleph Corp <Ntt> Electron beam projection image forming device
JPS5645025A (en) * 1979-09-21 1981-04-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam lithography apparatus
JPS6413816A (en) * 1987-06-26 1989-01-18 Hewlett Packard Yokogawa Signal generator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367365A (en) * 1976-11-29 1978-06-15 Nippon Telegr & Teleph Corp <Ntt> Correcting method for beam position
JPS53146575A (en) * 1977-05-27 1978-12-20 Nippon Telegr & Teleph Corp <Ntt> Electron beam projection image forming device
JPS5645025A (en) * 1979-09-21 1981-04-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam lithography apparatus
JPS6413816A (en) * 1987-06-26 1989-01-18 Hewlett Packard Yokogawa Signal generator

Also Published As

Publication number Publication date
JPS5240831B2 (xx) 1977-10-14

Similar Documents

Publication Publication Date Title
CS168141B1 (xx)
FR2190565B1 (xx)
JPS5240831B2 (xx)
FR2198873B1 (xx)
FR2189012B1 (xx)
JPS4969610A (xx)
CS161202B1 (xx)
JPS4979675U (xx)
CS159460B1 (xx)
CS158523B1 (xx)
CS152932B1 (xx)
CS153299B1 (xx)
CS154351B1 (xx)
CS155396B1 (xx)
CS156374B1 (xx)
CS157387B1 (xx)
CS171854B1 (xx)
CS157798B1 (xx)
CS167536B1 (xx)
CS162845B1 (xx)
CS162177B1 (xx)
JPS4890732U (xx)
CS159991B1 (xx)
CS159509B1 (xx)
JPS4983962A (xx)