JPS494983A - - Google Patents
Info
- Publication number
- JPS494983A JPS494983A JP47041318A JP4131872A JPS494983A JP S494983 A JPS494983 A JP S494983A JP 47041318 A JP47041318 A JP 47041318A JP 4131872 A JP4131872 A JP 4131872A JP S494983 A JPS494983 A JP S494983A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47041318A JPS5240831B2 (en:Method) | 1972-04-26 | 1972-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47041318A JPS5240831B2 (en:Method) | 1972-04-26 | 1972-04-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS494983A true JPS494983A (en:Method) | 1974-01-17 |
| JPS5240831B2 JPS5240831B2 (en:Method) | 1977-10-14 |
Family
ID=12605148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47041318A Expired JPS5240831B2 (en:Method) | 1972-04-26 | 1972-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5240831B2 (en:Method) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367365A (en) * | 1976-11-29 | 1978-06-15 | Nippon Telegr & Teleph Corp <Ntt> | Correcting method for beam position |
| JPS53146575A (en) * | 1977-05-27 | 1978-12-20 | Nippon Telegr & Teleph Corp <Ntt> | Electron beam projection image forming device |
| JPS5645025A (en) * | 1979-09-21 | 1981-04-24 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electron beam lithography apparatus |
| JPS6413816A (en) * | 1987-06-26 | 1989-01-18 | Hewlett Packard Yokogawa | Signal generator |
-
1972
- 1972-04-26 JP JP47041318A patent/JPS5240831B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367365A (en) * | 1976-11-29 | 1978-06-15 | Nippon Telegr & Teleph Corp <Ntt> | Correcting method for beam position |
| JPS53146575A (en) * | 1977-05-27 | 1978-12-20 | Nippon Telegr & Teleph Corp <Ntt> | Electron beam projection image forming device |
| JPS5645025A (en) * | 1979-09-21 | 1981-04-24 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electron beam lithography apparatus |
| JPS6413816A (en) * | 1987-06-26 | 1989-01-18 | Hewlett Packard Yokogawa | Signal generator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5240831B2 (en:Method) | 1977-10-14 |