JPS494851B1 - - Google Patents

Info

Publication number
JPS494851B1
JPS494851B1 JP9224068A JP9224068A JPS494851B1 JP S494851 B1 JPS494851 B1 JP S494851B1 JP 9224068 A JP9224068 A JP 9224068A JP 9224068 A JP9224068 A JP 9224068A JP S494851 B1 JPS494851 B1 JP S494851B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9224068A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS494851B1 publication Critical patent/JPS494851B1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0751Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
JP9224068A 1968-04-26 1968-12-16 Pending JPS494851B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US72464068A 1968-04-26 1968-04-26

Publications (1)

Publication Number Publication Date
JPS494851B1 true JPS494851B1 (en) 1974-02-04

Family

ID=24911238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9224068A Pending JPS494851B1 (en) 1968-04-26 1968-12-16

Country Status (7)

Country Link
JP (1) JPS494851B1 (en)
AT (1) AT297478B (en)
BE (1) BE732026A (en)
DE (1) DE1920932C3 (en)
FR (1) FR2007530A1 (en)
GB (1) GB1246704A (en)
NL (1) NL6906398A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2441315A1 (en) * 1974-08-29 1976-03-11 Hoechst Ag PRESSURE PLATE PRESENSITIZED WITH O-NAPHTHOQUINONDIAZIDE COMPOUND
WO1983003485A1 (en) * 1982-03-29 1983-10-13 Motorola Inc Electron beam-optical hybrid lithographic resist process
GB8403698D0 (en) * 1984-02-13 1984-03-14 British Telecomm Semiconductor device fabrication
US4782008A (en) * 1985-03-19 1988-11-01 International Business Machines Corporation Plasma-resistant polymeric material, preparation thereof, and use thereof
US4737425A (en) * 1986-06-10 1988-04-12 International Business Machines Corporation Patterned resist and process
DE3720465A1 (en) * 1987-06-20 1988-12-29 Asea Brown Boveri Adhesion promoter for negative resist for the purpose of etching deep trenches in silicon wafers having a smooth surface, and method for preparing the adhesion promoter

Also Published As

Publication number Publication date
FR2007530A1 (en) 1970-01-09
BE732026A (en) 1969-10-24
DE1920932C3 (en) 1975-12-04
DE1920932A1 (en) 1971-04-08
GB1246704A (en) 1971-09-15
AT297478B (en) 1972-03-27
DE1920932B2 (en) 1971-11-25
NL6906398A (en) 1969-10-28

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