JPS4948347A - - Google Patents

Info

Publication number
JPS4948347A
JPS4948347A JP48058932A JP5893273A JPS4948347A JP S4948347 A JPS4948347 A JP S4948347A JP 48058932 A JP48058932 A JP 48058932A JP 5893273 A JP5893273 A JP 5893273A JP S4948347 A JPS4948347 A JP S4948347A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48058932A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4948347A publication Critical patent/JPS4948347A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/40—Optical focusing aids

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP48058932A 1972-05-25 1973-05-25 Pending JPS4948347A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25669372A 1972-05-25 1972-05-25

Publications (1)

Publication Number Publication Date
JPS4948347A true JPS4948347A (ja) 1974-05-10

Family

ID=22973212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48058932A Pending JPS4948347A (ja) 1972-05-25 1973-05-25

Country Status (2)

Country Link
US (1) US3768910A (ja)
JP (1) JPS4948347A (ja)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3847485A (en) * 1972-05-25 1974-11-12 Zygo Corp Optical noncontacting surface sensor for measuring distance and angle of a test surface
FR2222666B1 (ja) * 1973-03-19 1976-11-05 Thomson Brandt
US3901597A (en) * 1973-09-13 1975-08-26 Philco Ford Corp Laser distance measuring device
US4090790A (en) * 1976-07-08 1978-05-23 American Optical Corporation Apparatus for testing the refractive power(s) of lenses
FR2442447A1 (fr) * 1978-11-22 1980-06-20 Hamel Bernard Procede et dispositif de mesure d'accelerations
JPS5593008A (en) * 1979-01-09 1980-07-15 Canon Inc Signal formation unit
DE2908757C2 (de) * 1979-03-06 1986-10-16 Baumgartner, Viktor, 8028 Taufkirchen Abstandsänderungs-Meßanordnung
US4353650A (en) * 1980-06-16 1982-10-12 The United States Of America As Represented By The United States Department Of Energy Laser heterodyne surface profiler
FI823028A0 (fi) * 1982-09-01 1982-09-01 Kalevi Juhani Kalliomaeki Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer
US4495589A (en) * 1982-09-20 1985-01-22 Crane Co. Aircraft ground velocity determination system
US4860374A (en) * 1984-04-19 1989-08-22 Nikon Corporation Apparatus for detecting position of reference pattern
DE3517044A1 (de) * 1985-05-11 1986-11-13 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn Verfahren und vorrichtung zur beruehrungslosen optischen messung von entfernungsaenderungen
US4920273A (en) * 1985-06-17 1990-04-24 View Engineering, Inc. Z-axis measurement system
US5144477A (en) * 1988-04-11 1992-09-01 Medical Research Council Method of operating a scanning confocal imaging system
US5032720A (en) * 1988-04-21 1991-07-16 White John G Confocal imaging system
US5543918A (en) * 1995-01-06 1996-08-06 International Business Machines Corporation Through-the-lens confocal height measurement
JP3713185B2 (ja) * 2000-05-11 2005-11-02 ペンタックス株式会社 Ａｆ測量機
DE10141544A1 (de) * 2001-08-24 2003-03-13 Eppendorf Ag Vorrichtung zur Behandlung von Flüssigkeiten und Verfahren zum Betreiben der Vorrichtung
US20030227614A1 (en) * 2002-06-05 2003-12-11 Taminiau August A. Laser machining apparatus with automatic focusing
JP4127503B2 (ja) * 2002-11-22 2008-07-30 株式会社トプコン 反射体自動追尾装置
JP4209709B2 (ja) * 2003-03-20 2009-01-14 株式会社キーエンス 変位計
US7349078B2 (en) * 2005-04-29 2008-03-25 University Of Dayton Characterization of lenses
US7719674B2 (en) * 2006-11-28 2010-05-18 Applied Materials South East Asia Pte. Ltd. Image splitting in optical inspection systems
US7714998B2 (en) * 2006-11-28 2010-05-11 Applied Materials South East Asia Pte. Ltd. Image splitting in optical inspection systems
JP6335495B2 (ja) * 2013-12-09 2018-05-30 パナソニック デバイスＳｕｎｘ株式会社 変位センサ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2968994A (en) * 1956-04-23 1961-01-24 Polaroid Corp Automatic focusing devices and systems
US3542472A (en) * 1967-01-10 1970-11-24 Perkin Elmer Corp Distance measuring apparatus
JPS5227531B1 (ja) * 1970-12-22 1977-07-21

Also Published As

Publication number Publication date
US3768910A (en) 1973-10-30

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